6/30/2010	12:25:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	12:25:08 AM	Recipe started at 12:25 AM
6/30/2010	12:25:08 AM	H2 valve closed
6/30/2010	12:25:08 AM	BCl3 valve closed
6/30/2010	12:25:08 AM	PH3 valve closed
6/30/2010	12:25:08 AM	SiCl4 pre valve closed
6/30/2010	12:25:08 AM	SiCl4 post valve closed
6/30/2010	12:25:08 AM	Main Vac valve closed
6/30/2010	12:25:08 AM	Bypass valve closed
6/30/2010	12:25:08 AM	Bubbler valve closed
6/30/2010	12:25:08 AM	Helium valve opened
6/30/2010	12:25:08 AM	Helium MFC set to  500.000000
6/30/2010	12:25:08 AM	H2 MFC set to  0.000000
6/30/2010	12:25:08 AM	BCl3 MFC set to  0.000000
6/30/2010	12:25:08 AM	PHl3 MFC set to  0.000000
6/30/2010	12:25:08 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:25:08 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:25:08 AM	Tube furnace set to 0
6/30/2010	12:25:17 AM	Helium valve closed
6/30/2010	12:25:17 AM	H2 valve closed
6/30/2010	12:25:17 AM	BCl3 valve closed
6/30/2010	12:25:17 AM	PH3 valve closed
6/30/2010	12:25:17 AM	SiCl4 pre valve closed
6/30/2010	12:25:17 AM	SiCl4 post valve closed
6/30/2010	12:25:17 AM	Main Vac valve closed
6/30/2010	12:25:17 AM	Bypass valve closed
6/30/2010	12:25:17 AM	Bubbler valve closed
6/30/2010	12:25:17 AM	Helium MFC set to  0.000000
6/30/2010	12:25:17 AM	H2 MFC set to  0.000000
6/30/2010	12:25:17 AM	BCl3 MFC set to  0.000000
6/30/2010	12:25:17 AM	PHl3 MFC set to  0.000000
6/30/2010	12:25:17 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:25:17 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:25:17 AM	Tube furnace set to 0
6/30/2010	12:25:17 AM	Run finished at 12:25 AM
6/30/2010	12:25:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	12:32:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	12:32:27 AM	Recipe started at 12:32 AM
6/30/2010	12:32:27 AM	Helium valve closed
6/30/2010	12:32:27 AM	H2 valve closed
6/30/2010	12:32:27 AM	BCl3 valve closed
6/30/2010	12:32:27 AM	PH3 valve closed
6/30/2010	12:32:27 AM	SiCl4 pre valve closed
6/30/2010	12:32:27 AM	SiCl4 post valve closed
6/30/2010	12:32:27 AM	Main Vac valve closed
6/30/2010	12:32:27 AM	Bubbler valve closed
6/30/2010	12:32:27 AM	Bypass valve opened
6/30/2010	12:32:27 AM	Helium MFC set to  0.000000
6/30/2010	12:32:27 AM	H2 MFC set to  0.000000
6/30/2010	12:32:27 AM	BCl3 MFC set to  0.000000
6/30/2010	12:32:27 AM	PHl3 MFC set to  0.000000
6/30/2010	12:32:27 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:32:27 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:32:27 AM	Tube furnace set to 0
6/30/2010	12:33:14 AM	Helium valve closed
6/30/2010	12:33:14 AM	H2 valve closed
6/30/2010	12:33:14 AM	BCl3 valve closed
6/30/2010	12:33:14 AM	PH3 valve closed
6/30/2010	12:33:14 AM	SiCl4 pre valve closed
6/30/2010	12:33:14 AM	SiCl4 post valve closed
6/30/2010	12:33:14 AM	Bubbler valve closed
6/30/2010	12:33:14 AM	Main Vac valve opened
6/30/2010	12:33:14 AM	Bypass valve opened
6/30/2010	12:33:14 AM	Helium MFC set to  0.000000
6/30/2010	12:33:14 AM	H2 MFC set to  0.000000
6/30/2010	12:33:14 AM	BCl3 MFC set to  0.000000
6/30/2010	12:33:14 AM	PHl3 MFC set to  0.000000
6/30/2010	12:33:14 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:33:14 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:33:14 AM	Tube furnace set to 0
6/30/2010	12:33:14 AM	Run finished at 12:33 AM
6/30/2010	12:33:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	12:33:50 AM	Recipe started at 12:33 AM
6/30/2010	12:33:50 AM	Helium valve closed
6/30/2010	12:33:50 AM	H2 valve closed
6/30/2010	12:33:50 AM	BCl3 valve closed
6/30/2010	12:33:50 AM	PH3 valve closed
6/30/2010	12:33:50 AM	SiCl4 pre valve closed
6/30/2010	12:33:50 AM	SiCl4 post valve closed
6/30/2010	12:33:50 AM	Main Vac valve closed
6/30/2010	12:33:50 AM	Bubbler valve closed
6/30/2010	12:33:50 AM	Bypass valve opened
6/30/2010	12:33:50 AM	Helium MFC set to  0.000000
6/30/2010	12:33:50 AM	H2 MFC set to  0.000000
6/30/2010	12:33:50 AM	BCl3 MFC set to  0.000000
6/30/2010	12:33:50 AM	PHl3 MFC set to  0.000000
6/30/2010	12:33:50 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:33:50 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:33:50 AM	Tube furnace set to 0
6/30/2010	12:33:51 AM	Helium valve closed
6/30/2010	12:33:51 AM	H2 valve closed
6/30/2010	12:33:51 AM	BCl3 valve closed
6/30/2010	12:33:51 AM	PH3 valve closed
6/30/2010	12:33:51 AM	SiCl4 pre valve closed
6/30/2010	12:33:51 AM	SiCl4 post valve closed
6/30/2010	12:33:51 AM	Bubbler valve closed
6/30/2010	12:33:51 AM	Main Vac valve opened
6/30/2010	12:33:51 AM	Bypass valve opened
6/30/2010	12:33:51 AM	Helium MFC set to  0.000000
6/30/2010	12:33:51 AM	H2 MFC set to  0.000000
6/30/2010	12:33:51 AM	BCl3 MFC set to  0.000000
6/30/2010	12:33:51 AM	PHl3 MFC set to  0.000000
6/30/2010	12:33:51 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:33:51 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:33:51 AM	Tube furnace set to 0
6/30/2010	12:34:51 AM	H2 valve closed
6/30/2010	12:34:51 AM	BCl3 valve closed
6/30/2010	12:34:51 AM	PH3 valve closed
6/30/2010	12:34:51 AM	SiCl4 pre valve closed
6/30/2010	12:34:51 AM	SiCl4 post valve closed
6/30/2010	12:34:51 AM	Bubbler valve closed
6/30/2010	12:34:51 AM	Helium valve opened
6/30/2010	12:34:51 AM	Main Vac valve opened
6/30/2010	12:34:51 AM	Bypass valve opened
6/30/2010	12:34:51 AM	Helium MFC set to  100.000000
6/30/2010	12:34:51 AM	H2 MFC set to  0.000000
6/30/2010	12:34:51 AM	BCl3 MFC set to  0.000000
6/30/2010	12:34:51 AM	PHl3 MFC set to  0.000000
6/30/2010	12:34:51 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:34:51 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:34:51 AM	Tube furnace set to 0
6/30/2010	12:43:51 AM	Helium valve closed
6/30/2010	12:43:51 AM	H2 valve closed
6/30/2010	12:43:51 AM	BCl3 valve closed
6/30/2010	12:43:51 AM	PH3 valve closed
6/30/2010	12:43:51 AM	SiCl4 pre valve closed
6/30/2010	12:43:51 AM	SiCl4 post valve closed
6/30/2010	12:43:51 AM	Bubbler valve closed
6/30/2010	12:43:51 AM	Main Vac valve opened
6/30/2010	12:43:51 AM	Bypass valve opened
6/30/2010	12:43:51 AM	Helium MFC set to  0.000000
6/30/2010	12:43:51 AM	H2 MFC set to  0.000000
6/30/2010	12:43:51 AM	BCl3 MFC set to  0.000000
6/30/2010	12:43:51 AM	PHl3 MFC set to  0.000000
6/30/2010	12:43:51 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:43:51 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:43:51 AM	Tube furnace set to 0
6/30/2010	12:44:51 AM	H2 valve closed
6/30/2010	12:44:51 AM	BCl3 valve closed
6/30/2010	12:44:51 AM	PH3 valve closed
6/30/2010	12:44:51 AM	SiCl4 pre valve closed
6/30/2010	12:44:51 AM	SiCl4 post valve closed
6/30/2010	12:44:51 AM	Bubbler valve closed
6/30/2010	12:44:51 AM	Helium valve opened
6/30/2010	12:44:51 AM	Main Vac valve opened
6/30/2010	12:44:51 AM	Bypass valve opened
6/30/2010	12:44:51 AM	Helium MFC set to  100.000000
6/30/2010	12:44:51 AM	H2 MFC set to  0.000000
6/30/2010	12:44:51 AM	BCl3 MFC set to  0.000000
6/30/2010	12:44:51 AM	PHl3 MFC set to  0.000000
6/30/2010	12:44:51 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:44:51 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:44:51 AM	Tube furnace set to 0
6/30/2010	12:53:51 AM	Helium valve closed
6/30/2010	12:53:51 AM	H2 valve closed
6/30/2010	12:53:51 AM	BCl3 valve closed
6/30/2010	12:53:51 AM	PH3 valve closed
6/30/2010	12:53:51 AM	SiCl4 pre valve closed
6/30/2010	12:53:51 AM	SiCl4 post valve closed
6/30/2010	12:53:51 AM	Bubbler valve closed
6/30/2010	12:53:51 AM	Main Vac valve opened
6/30/2010	12:53:51 AM	Bypass valve opened
6/30/2010	12:53:51 AM	Helium MFC set to  0.000000
6/30/2010	12:53:51 AM	H2 MFC set to  0.000000
6/30/2010	12:53:51 AM	BCl3 MFC set to  0.000000
6/30/2010	12:53:51 AM	PHl3 MFC set to  0.000000
6/30/2010	12:53:51 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:53:51 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:53:52 AM	Tube furnace set to 0
6/30/2010	12:54:52 AM	H2 valve closed
6/30/2010	12:54:52 AM	BCl3 valve closed
6/30/2010	12:54:52 AM	PH3 valve closed
6/30/2010	12:54:52 AM	SiCl4 pre valve closed
6/30/2010	12:54:52 AM	SiCl4 post valve closed
6/30/2010	12:54:52 AM	Bubbler valve closed
6/30/2010	12:54:52 AM	Helium valve opened
6/30/2010	12:54:52 AM	Main Vac valve opened
6/30/2010	12:54:52 AM	Bypass valve opened
6/30/2010	12:54:52 AM	Helium MFC set to  100.000000
6/30/2010	12:54:52 AM	H2 MFC set to  0.000000
6/30/2010	12:54:52 AM	BCl3 MFC set to  0.000000
6/30/2010	12:54:52 AM	PHl3 MFC set to  0.000000
6/30/2010	12:54:52 AM	SiCl4 MFC set to  0.000000
6/30/2010	12:54:52 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:54:52 AM	Tube furnace set to 0
6/30/2010	1:03:52 AM	Helium valve closed
6/30/2010	1:03:52 AM	H2 valve closed
6/30/2010	1:03:52 AM	BCl3 valve closed
6/30/2010	1:03:52 AM	PH3 valve closed
6/30/2010	1:03:52 AM	SiCl4 pre valve closed
6/30/2010	1:03:52 AM	SiCl4 post valve closed
6/30/2010	1:03:52 AM	Bubbler valve closed
6/30/2010	1:03:52 AM	Main Vac valve opened
6/30/2010	1:03:52 AM	Bypass valve opened
6/30/2010	1:03:52 AM	Helium MFC set to  0.000000
6/30/2010	1:03:52 AM	H2 MFC set to  0.000000
6/30/2010	1:03:52 AM	BCl3 MFC set to  0.000000
6/30/2010	1:03:52 AM	PHl3 MFC set to  0.000000
6/30/2010	1:03:52 AM	SiCl4 MFC set to  0.000000
6/30/2010	1:03:52 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:03:52 AM	Tube furnace set to 0
6/30/2010	1:03:53 AM	Run finished at 1:03 AM
6/30/2010	9:26:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/30/2010	9:26:13 AM	Recipe started at 9:26 AM
6/30/2010	9:26:13 AM	Helium valve closed
6/30/2010	9:26:13 AM	H2 valve closed
6/30/2010	9:26:13 AM	BCl3 valve closed
6/30/2010	9:26:13 AM	PH3 valve closed
6/30/2010	9:26:13 AM	SiCl4 pre valve closed
6/30/2010	9:26:13 AM	SiCl4 post valve closed
6/30/2010	9:26:13 AM	Main Vac valve closed
6/30/2010	9:26:13 AM	Bypass valve closed
6/30/2010	9:26:13 AM	Bubbler valve closed
6/30/2010	9:26:13 AM	Helium MFC set to  0.000000
6/30/2010	9:26:13 AM	H2 MFC set to  0.000000
6/30/2010	9:26:13 AM	BCl3 MFC set to  0.000000
6/30/2010	9:26:13 AM	PHl3 MFC set to  0.000000
6/30/2010	9:26:13 AM	SiCl4 MFC set to  0.000000
6/30/2010	9:26:13 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:26:13 AM	Tube furnace set to 0
6/30/2010	9:26:13 AM	Run finished at 9:26 AM
6/30/2010	9:26:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/30/2010	9:26:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	9:26:32 AM	Recipe started at 9:26 AM
6/30/2010	9:26:32 AM	Helium valve closed
6/30/2010	9:26:32 AM	H2 valve closed
6/30/2010	9:26:32 AM	BCl3 valve closed
6/30/2010	9:26:32 AM	PH3 valve closed
6/30/2010	9:26:32 AM	SiCl4 pre valve closed
6/30/2010	9:26:32 AM	SiCl4 post valve closed
6/30/2010	9:26:32 AM	Main Vac valve closed
6/30/2010	9:26:32 AM	Bubbler valve closed
6/30/2010	9:26:32 AM	Bypass valve opened
6/30/2010	9:26:32 AM	Helium MFC set to  0.000000
6/30/2010	9:26:32 AM	H2 MFC set to  0.000000
6/30/2010	9:26:32 AM	BCl3 MFC set to  0.000000
6/30/2010	9:26:32 AM	PHl3 MFC set to  0.000000
6/30/2010	9:26:32 AM	SiCl4 MFC set to  0.000000
6/30/2010	9:26:32 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:26:33 AM	Tube furnace set to 0
6/30/2010	9:26:33 AM	Helium valve closed
6/30/2010	9:26:33 AM	H2 valve closed
6/30/2010	9:26:33 AM	BCl3 valve closed
6/30/2010	9:26:33 AM	PH3 valve closed
6/30/2010	9:26:33 AM	SiCl4 pre valve closed
6/30/2010	9:26:33 AM	SiCl4 post valve closed
6/30/2010	9:26:33 AM	Bubbler valve closed
6/30/2010	9:26:33 AM	Main Vac valve opened
6/30/2010	9:26:33 AM	Bypass valve opened
6/30/2010	9:26:33 AM	Helium MFC set to  0.000000
6/30/2010	9:26:33 AM	H2 MFC set to  0.000000
6/30/2010	9:26:33 AM	BCl3 MFC set to  0.000000
6/30/2010	9:26:33 AM	PHl3 MFC set to  0.000000
6/30/2010	9:26:33 AM	SiCl4 MFC set to  0.000000
6/30/2010	9:26:33 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:26:33 AM	Tube furnace set to 0
6/30/2010	9:26:33 AM	Run finished at 9:26 AM
6/30/2010	9:26:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	9:28:44 AM	Recipe started at 9:28 AM
6/30/2010	9:28:44 AM	Helium valve closed
6/30/2010	9:28:44 AM	BCl3 valve closed
6/30/2010	9:28:44 AM	PH3 valve closed
6/30/2010	9:28:44 AM	SiCl4 pre valve closed
6/30/2010	9:28:44 AM	SiCl4 post valve closed
6/30/2010	9:28:44 AM	Main Vac valve closed
6/30/2010	9:28:44 AM	Bypass valve closed
6/30/2010	9:28:44 AM	Bubbler valve closed
6/30/2010	9:28:44 AM	H2 valve opened
6/30/2010	9:28:44 AM	Helium MFC set to  0.000000
6/30/2010	9:28:44 AM	H2 MFC set to  500.000000
6/30/2010	9:28:44 AM	BCl3 MFC set to  0.000000
6/30/2010	9:28:44 AM	PHl3 MFC set to  0.000000
6/30/2010	9:28:44 AM	SiCl4 MFC set to  0.000000
6/30/2010	9:28:44 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:28:44 AM	Tube furnace set to 0
6/30/2010	9:30:07 AM	Helium valve closed
6/30/2010	9:30:07 AM	BCl3 valve closed
6/30/2010	9:30:07 AM	PH3 valve closed
6/30/2010	9:30:07 AM	SiCl4 pre valve closed
6/30/2010	9:30:07 AM	SiCl4 post valve closed
6/30/2010	9:30:07 AM	Main Vac valve closed
6/30/2010	9:30:07 AM	Bypass valve closed
6/30/2010	9:30:07 AM	H2 valve opened
6/30/2010	9:30:07 AM	Bubbler valve opened
6/30/2010	9:30:07 AM	Helium MFC set to  0.000000
6/30/2010	9:30:07 AM	H2 MFC set to  500.000000
6/30/2010	9:30:07 AM	BCl3 MFC set to  0.000000
6/30/2010	9:30:07 AM	PHl3 MFC set to  0.000000
6/30/2010	9:30:07 AM	SiCl4 MFC set to  0.000000
6/30/2010	9:30:07 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:30:07 AM	Tube furnace set to 1000
6/30/2010	9:50:07 AM	Helium valve closed
6/30/2010	9:50:07 AM	PH3 valve closed
6/30/2010	9:50:07 AM	Main Vac valve closed
6/30/2010	9:50:07 AM	Bypass valve closed
6/30/2010	9:50:07 AM	H2 valve opened
6/30/2010	9:50:07 AM	BCl3 valve opened
6/30/2010	9:50:07 AM	SiCl4 pre valve opened
6/30/2010	9:50:07 AM	SiCl4 post valve opened
6/30/2010	9:50:07 AM	Bubbler valve opened
6/30/2010	9:50:07 AM	Helium MFC set to  0.000000
6/30/2010	9:50:07 AM	H2 MFC set to  500.000000
6/30/2010	9:50:07 AM	BCl3 MFC set to  12.000000
6/30/2010	9:50:07 AM	PHl3 MFC set to  0.000000
6/30/2010	9:50:07 AM	SiCl4 MFC set to  50.000000
6/30/2010	9:50:07 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:50:07 AM	Tube furnace set to 1000
6/30/2010	10:05:07 AM	H2 valve closed
6/30/2010	10:05:07 AM	BCl3 valve closed
6/30/2010	10:05:07 AM	PH3 valve closed
6/30/2010	10:05:07 AM	SiCl4 pre valve closed
6/30/2010	10:05:07 AM	SiCl4 post valve closed
6/30/2010	10:05:07 AM	Main Vac valve closed
6/30/2010	10:05:07 AM	Bypass valve closed
6/30/2010	10:05:07 AM	Helium valve opened
6/30/2010	10:05:07 AM	Bubbler valve opened
6/30/2010	10:05:07 AM	Helium MFC set to  500.000000
6/30/2010	10:05:07 AM	H2 MFC set to  0.000000
6/30/2010	10:05:07 AM	BCl3 MFC set to  0.000000
6/30/2010	10:05:07 AM	PHl3 MFC set to  0.000000
6/30/2010	10:05:07 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:05:07 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:05:07 AM	Tube furnace set to 0
6/30/2010	10:25:07 AM	Helium valve closed
6/30/2010	10:25:07 AM	H2 valve closed
6/30/2010	10:25:07 AM	BCl3 valve closed
6/30/2010	10:25:07 AM	PH3 valve closed
6/30/2010	10:25:07 AM	SiCl4 pre valve closed
6/30/2010	10:25:07 AM	SiCl4 post valve closed
6/30/2010	10:25:07 AM	Main Vac valve closed
6/30/2010	10:25:07 AM	Bypass valve closed
6/30/2010	10:25:07 AM	Bubbler valve closed
6/30/2010	10:25:07 AM	Helium MFC set to  0.000000
6/30/2010	10:25:07 AM	H2 MFC set to  0.000000
6/30/2010	10:25:07 AM	BCl3 MFC set to  0.000000
6/30/2010	10:25:07 AM	PHl3 MFC set to  0.000000
6/30/2010	10:25:07 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:25:07 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:25:07 AM	Tube furnace set to 0
6/30/2010	10:25:08 AM	Run finished at 10:25 AM
6/30/2010	10:49:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	10:49:34 AM	Recipe started at 10:49 AM
6/30/2010	10:49:34 AM	Helium valve closed
6/30/2010	10:49:34 AM	H2 valve closed
6/30/2010	10:49:34 AM	BCl3 valve closed
6/30/2010	10:49:34 AM	PH3 valve closed
6/30/2010	10:49:34 AM	SiCl4 pre valve closed
6/30/2010	10:49:34 AM	SiCl4 post valve closed
6/30/2010	10:49:34 AM	Main Vac valve closed
6/30/2010	10:49:34 AM	Bubbler valve closed
6/30/2010	10:49:34 AM	Bypass valve opened
6/30/2010	10:49:34 AM	Helium MFC set to  0.000000
6/30/2010	10:49:34 AM	H2 MFC set to  0.000000
6/30/2010	10:49:34 AM	BCl3 MFC set to  0.000000
6/30/2010	10:49:34 AM	PHl3 MFC set to  0.000000
6/30/2010	10:49:34 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:49:34 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:49:34 AM	Tube furnace set to 0
6/30/2010	10:50:23 AM	Helium valve closed
6/30/2010	10:50:23 AM	H2 valve closed
6/30/2010	10:50:23 AM	BCl3 valve closed
6/30/2010	10:50:23 AM	PH3 valve closed
6/30/2010	10:50:23 AM	SiCl4 pre valve closed
6/30/2010	10:50:23 AM	SiCl4 post valve closed
6/30/2010	10:50:23 AM	Bubbler valve closed
6/30/2010	10:50:23 AM	Main Vac valve opened
6/30/2010	10:50:23 AM	Bypass valve opened
6/30/2010	10:50:23 AM	Helium MFC set to  0.000000
6/30/2010	10:50:23 AM	H2 MFC set to  0.000000
6/30/2010	10:50:23 AM	BCl3 MFC set to  0.000000
6/30/2010	10:50:23 AM	PHl3 MFC set to  0.000000
6/30/2010	10:50:23 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:50:23 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:50:23 AM	Tube furnace set to 0
6/30/2010	10:50:24 AM	Run finished at 10:50 AM
6/30/2010	10:50:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	10:52:57 AM	Recipe started at 10:52 AM
6/30/2010	10:52:57 AM	Helium valve closed
6/30/2010	10:52:57 AM	H2 valve closed
6/30/2010	10:52:57 AM	BCl3 valve closed
6/30/2010	10:52:57 AM	PH3 valve closed
6/30/2010	10:52:57 AM	SiCl4 pre valve closed
6/30/2010	10:52:57 AM	SiCl4 post valve closed
6/30/2010	10:52:57 AM	Main Vac valve closed
6/30/2010	10:52:57 AM	Bubbler valve closed
6/30/2010	10:52:57 AM	Bypass valve opened
6/30/2010	10:52:57 AM	Helium MFC set to  0.000000
6/30/2010	10:52:57 AM	H2 MFC set to  0.000000
6/30/2010	10:52:57 AM	BCl3 MFC set to  0.000000
6/30/2010	10:52:57 AM	PHl3 MFC set to  0.000000
6/30/2010	10:52:57 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:52:57 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:52:57 AM	Tube furnace set to 0
6/30/2010	10:52:58 AM	Helium valve closed
6/30/2010	10:52:58 AM	H2 valve closed
6/30/2010	10:52:58 AM	BCl3 valve closed
6/30/2010	10:52:58 AM	PH3 valve closed
6/30/2010	10:52:58 AM	SiCl4 pre valve closed
6/30/2010	10:52:58 AM	SiCl4 post valve closed
6/30/2010	10:52:58 AM	Bubbler valve closed
6/30/2010	10:52:58 AM	Main Vac valve opened
6/30/2010	10:52:58 AM	Bypass valve opened
6/30/2010	10:52:58 AM	Helium MFC set to  0.000000
6/30/2010	10:52:58 AM	H2 MFC set to  0.000000
6/30/2010	10:52:58 AM	BCl3 MFC set to  0.000000
6/30/2010	10:52:58 AM	PHl3 MFC set to  0.000000
6/30/2010	10:52:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:52:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:52:58 AM	Tube furnace set to 0
6/30/2010	10:53:58 AM	H2 valve closed
6/30/2010	10:53:58 AM	BCl3 valve closed
6/30/2010	10:53:58 AM	PH3 valve closed
6/30/2010	10:53:58 AM	SiCl4 pre valve closed
6/30/2010	10:53:58 AM	SiCl4 post valve closed
6/30/2010	10:53:58 AM	Bubbler valve closed
6/30/2010	10:53:58 AM	Helium valve opened
6/30/2010	10:53:58 AM	Main Vac valve opened
6/30/2010	10:53:58 AM	Bypass valve opened
6/30/2010	10:53:58 AM	Helium MFC set to  100.000000
6/30/2010	10:53:58 AM	H2 MFC set to  0.000000
6/30/2010	10:53:58 AM	BCl3 MFC set to  0.000000
6/30/2010	10:53:58 AM	PHl3 MFC set to  0.000000
6/30/2010	10:53:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	10:53:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:53:58 AM	Tube furnace set to 0
6/30/2010	11:02:58 AM	Helium valve closed
6/30/2010	11:02:58 AM	H2 valve closed
6/30/2010	11:02:58 AM	BCl3 valve closed
6/30/2010	11:02:58 AM	PH3 valve closed
6/30/2010	11:02:58 AM	SiCl4 pre valve closed
6/30/2010	11:02:58 AM	SiCl4 post valve closed
6/30/2010	11:02:58 AM	Bubbler valve closed
6/30/2010	11:02:58 AM	Main Vac valve opened
6/30/2010	11:02:58 AM	Bypass valve opened
6/30/2010	11:02:58 AM	Helium MFC set to  0.000000
6/30/2010	11:02:58 AM	H2 MFC set to  0.000000
6/30/2010	11:02:58 AM	BCl3 MFC set to  0.000000
6/30/2010	11:02:58 AM	PHl3 MFC set to  0.000000
6/30/2010	11:02:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:02:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:02:58 AM	Tube furnace set to 0
6/30/2010	11:03:58 AM	H2 valve closed
6/30/2010	11:03:58 AM	BCl3 valve closed
6/30/2010	11:03:58 AM	PH3 valve closed
6/30/2010	11:03:58 AM	SiCl4 pre valve closed
6/30/2010	11:03:58 AM	SiCl4 post valve closed
6/30/2010	11:03:58 AM	Bubbler valve closed
6/30/2010	11:03:58 AM	Helium valve opened
6/30/2010	11:03:58 AM	Main Vac valve opened
6/30/2010	11:03:58 AM	Bypass valve opened
6/30/2010	11:03:58 AM	Helium MFC set to  100.000000
6/30/2010	11:03:58 AM	H2 MFC set to  0.000000
6/30/2010	11:03:58 AM	BCl3 MFC set to  0.000000
6/30/2010	11:03:58 AM	PHl3 MFC set to  0.000000
6/30/2010	11:03:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:03:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:03:58 AM	Tube furnace set to 0
6/30/2010	11:12:58 AM	Helium valve closed
6/30/2010	11:12:58 AM	H2 valve closed
6/30/2010	11:12:58 AM	BCl3 valve closed
6/30/2010	11:12:58 AM	PH3 valve closed
6/30/2010	11:12:58 AM	SiCl4 pre valve closed
6/30/2010	11:12:58 AM	SiCl4 post valve closed
6/30/2010	11:12:58 AM	Bubbler valve closed
6/30/2010	11:12:58 AM	Main Vac valve opened
6/30/2010	11:12:58 AM	Bypass valve opened
6/30/2010	11:12:58 AM	Helium MFC set to  0.000000
6/30/2010	11:12:58 AM	H2 MFC set to  0.000000
6/30/2010	11:12:58 AM	BCl3 MFC set to  0.000000
6/30/2010	11:12:58 AM	PHl3 MFC set to  0.000000
6/30/2010	11:12:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:12:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:12:58 AM	Tube furnace set to 0
6/30/2010	11:13:58 AM	H2 valve closed
6/30/2010	11:13:58 AM	BCl3 valve closed
6/30/2010	11:13:58 AM	PH3 valve closed
6/30/2010	11:13:58 AM	SiCl4 pre valve closed
6/30/2010	11:13:58 AM	SiCl4 post valve closed
6/30/2010	11:13:58 AM	Bubbler valve closed
6/30/2010	11:13:58 AM	Helium valve opened
6/30/2010	11:13:58 AM	Main Vac valve opened
6/30/2010	11:13:58 AM	Bypass valve opened
6/30/2010	11:13:58 AM	Helium MFC set to  100.000000
6/30/2010	11:13:58 AM	H2 MFC set to  0.000000
6/30/2010	11:13:58 AM	BCl3 MFC set to  0.000000
6/30/2010	11:13:58 AM	PHl3 MFC set to  0.000000
6/30/2010	11:13:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:13:59 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:13:59 AM	Tube furnace set to 0
6/30/2010	11:22:59 AM	Helium valve closed
6/30/2010	11:22:59 AM	H2 valve closed
6/30/2010	11:22:59 AM	BCl3 valve closed
6/30/2010	11:22:59 AM	PH3 valve closed
6/30/2010	11:22:59 AM	SiCl4 pre valve closed
6/30/2010	11:22:59 AM	SiCl4 post valve closed
6/30/2010	11:22:59 AM	Bubbler valve closed
6/30/2010	11:22:59 AM	Main Vac valve opened
6/30/2010	11:22:59 AM	Bypass valve opened
6/30/2010	11:22:59 AM	Helium MFC set to  0.000000
6/30/2010	11:22:59 AM	H2 MFC set to  0.000000
6/30/2010	11:22:59 AM	BCl3 MFC set to  0.000000
6/30/2010	11:22:59 AM	PHl3 MFC set to  0.000000
6/30/2010	11:22:59 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:22:59 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:22:59 AM	Tube furnace set to 0
6/30/2010	11:23:00 AM	Run finished at 11:23 AM
6/30/2010	11:30:30 AM	Recipe started at 11:30 AM
6/30/2010	11:30:30 AM	Helium valve closed
6/30/2010	11:30:30 AM	H2 valve closed
6/30/2010	11:30:30 AM	BCl3 valve closed
6/30/2010	11:30:30 AM	PH3 valve closed
6/30/2010	11:30:30 AM	SiCl4 pre valve closed
6/30/2010	11:30:30 AM	SiCl4 post valve closed
6/30/2010	11:30:30 AM	Main Vac valve closed
6/30/2010	11:30:30 AM	Bubbler valve closed
6/30/2010	11:30:30 AM	Bypass valve opened
6/30/2010	11:30:30 AM	Helium MFC set to  0.000000
6/30/2010	11:30:30 AM	H2 MFC set to  0.000000
6/30/2010	11:30:30 AM	BCl3 MFC set to  0.000000
6/30/2010	11:30:30 AM	PHl3 MFC set to  0.000000
6/30/2010	11:30:30 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:30:30 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:30:30 AM	Tube furnace set to 0
6/30/2010	11:30:31 AM	Helium valve closed
6/30/2010	11:30:31 AM	H2 valve closed
6/30/2010	11:30:31 AM	BCl3 valve closed
6/30/2010	11:30:31 AM	PH3 valve closed
6/30/2010	11:30:31 AM	SiCl4 pre valve closed
6/30/2010	11:30:31 AM	SiCl4 post valve closed
6/30/2010	11:30:31 AM	Bubbler valve closed
6/30/2010	11:30:31 AM	Main Vac valve opened
6/30/2010	11:30:31 AM	Bypass valve opened
6/30/2010	11:30:31 AM	Helium MFC set to  0.000000
6/30/2010	11:30:31 AM	H2 MFC set to  0.000000
6/30/2010	11:30:31 AM	BCl3 MFC set to  0.000000
6/30/2010	11:30:31 AM	PHl3 MFC set to  0.000000
6/30/2010	11:30:31 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:30:31 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:30:31 AM	Tube furnace set to 0
6/30/2010	11:31:31 AM	H2 valve closed
6/30/2010	11:31:31 AM	BCl3 valve closed
6/30/2010	11:31:31 AM	PH3 valve closed
6/30/2010	11:31:31 AM	SiCl4 pre valve closed
6/30/2010	11:31:31 AM	SiCl4 post valve closed
6/30/2010	11:31:31 AM	Bubbler valve closed
6/30/2010	11:31:31 AM	Helium valve opened
6/30/2010	11:31:31 AM	Main Vac valve opened
6/30/2010	11:31:31 AM	Bypass valve opened
6/30/2010	11:31:31 AM	Helium MFC set to  100.000000
6/30/2010	11:31:31 AM	H2 MFC set to  0.000000
6/30/2010	11:31:31 AM	BCl3 MFC set to  0.000000
6/30/2010	11:31:31 AM	PHl3 MFC set to  0.000000
6/30/2010	11:31:31 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:31:31 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:31:31 AM	Tube furnace set to 0
6/30/2010	11:40:31 AM	Helium valve closed
6/30/2010	11:40:31 AM	H2 valve closed
6/30/2010	11:40:31 AM	BCl3 valve closed
6/30/2010	11:40:31 AM	PH3 valve closed
6/30/2010	11:40:31 AM	SiCl4 pre valve closed
6/30/2010	11:40:31 AM	SiCl4 post valve closed
6/30/2010	11:40:31 AM	Bubbler valve closed
6/30/2010	11:40:31 AM	Main Vac valve opened
6/30/2010	11:40:31 AM	Bypass valve opened
6/30/2010	11:40:31 AM	Helium MFC set to  0.000000
6/30/2010	11:40:31 AM	H2 MFC set to  0.000000
6/30/2010	11:40:31 AM	BCl3 MFC set to  0.000000
6/30/2010	11:40:31 AM	PHl3 MFC set to  0.000000
6/30/2010	11:40:31 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:40:31 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:40:31 AM	Tube furnace set to 0
6/30/2010	11:41:31 AM	H2 valve closed
6/30/2010	11:41:31 AM	BCl3 valve closed
6/30/2010	11:41:31 AM	PH3 valve closed
6/30/2010	11:41:31 AM	SiCl4 pre valve closed
6/30/2010	11:41:31 AM	SiCl4 post valve closed
6/30/2010	11:41:31 AM	Bubbler valve closed
6/30/2010	11:41:31 AM	Helium valve opened
6/30/2010	11:41:31 AM	Main Vac valve opened
6/30/2010	11:41:31 AM	Bypass valve opened
6/30/2010	11:41:31 AM	Helium MFC set to  100.000000
6/30/2010	11:41:31 AM	H2 MFC set to  0.000000
6/30/2010	11:41:31 AM	BCl3 MFC set to  0.000000
6/30/2010	11:41:31 AM	PHl3 MFC set to  0.000000
6/30/2010	11:41:31 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:41:31 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:41:31 AM	Tube furnace set to 0
6/30/2010	11:41:58 AM	Helium valve closed
6/30/2010	11:41:58 AM	H2 valve closed
6/30/2010	11:41:58 AM	BCl3 valve closed
6/30/2010	11:41:58 AM	PH3 valve closed
6/30/2010	11:41:58 AM	SiCl4 pre valve closed
6/30/2010	11:41:58 AM	SiCl4 post valve closed
6/30/2010	11:41:58 AM	Bubbler valve closed
6/30/2010	11:41:58 AM	Main Vac valve opened
6/30/2010	11:41:58 AM	Bypass valve opened
6/30/2010	11:41:58 AM	Helium MFC set to  0.000000
6/30/2010	11:41:58 AM	H2 MFC set to  0.000000
6/30/2010	11:41:58 AM	BCl3 MFC set to  0.000000
6/30/2010	11:41:58 AM	PHl3 MFC set to  0.000000
6/30/2010	11:41:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:41:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:41:58 AM	Tube furnace set to 0
6/30/2010	11:41:58 AM	H2 valve closed
6/30/2010	11:41:58 AM	BCl3 valve closed
6/30/2010	11:41:58 AM	PH3 valve closed
6/30/2010	11:41:58 AM	SiCl4 pre valve closed
6/30/2010	11:41:58 AM	SiCl4 post valve closed
6/30/2010	11:41:58 AM	Bubbler valve closed
6/30/2010	11:41:58 AM	Helium valve opened
6/30/2010	11:41:58 AM	Main Vac valve opened
6/30/2010	11:41:58 AM	Bypass valve opened
6/30/2010	11:41:58 AM	Helium MFC set to  100.000000
6/30/2010	11:41:58 AM	H2 MFC set to  0.000000
6/30/2010	11:41:58 AM	BCl3 MFC set to  0.000000
6/30/2010	11:41:58 AM	PHl3 MFC set to  0.000000
6/30/2010	11:41:58 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:41:58 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:41:59 AM	Tube furnace set to 0
6/30/2010	11:41:59 AM	Helium valve closed
6/30/2010	11:41:59 AM	H2 valve closed
6/30/2010	11:41:59 AM	BCl3 valve closed
6/30/2010	11:41:59 AM	PH3 valve closed
6/30/2010	11:41:59 AM	SiCl4 pre valve closed
6/30/2010	11:41:59 AM	SiCl4 post valve closed
6/30/2010	11:41:59 AM	Bubbler valve closed
6/30/2010	11:41:59 AM	Main Vac valve opened
6/30/2010	11:41:59 AM	Bypass valve opened
6/30/2010	11:41:59 AM	Helium MFC set to  0.000000
6/30/2010	11:41:59 AM	H2 MFC set to  0.000000
6/30/2010	11:41:59 AM	BCl3 MFC set to  0.000000
6/30/2010	11:41:59 AM	PHl3 MFC set to  0.000000
6/30/2010	11:41:59 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:41:59 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:41:59 AM	Tube furnace set to 0
6/30/2010	11:42:00 AM	Run finished at 11:42 AM
6/30/2010	11:48:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/30/2010	11:48:12 AM	Recipe started at 11:48 AM
6/30/2010	11:48:12 AM	Helium valve closed
6/30/2010	11:48:12 AM	H2 valve closed
6/30/2010	11:48:12 AM	BCl3 valve closed
6/30/2010	11:48:12 AM	PH3 valve closed
6/30/2010	11:48:12 AM	SiCl4 pre valve closed
6/30/2010	11:48:12 AM	SiCl4 post valve closed
6/30/2010	11:48:12 AM	Main Vac valve closed
6/30/2010	11:48:12 AM	Bypass valve closed
6/30/2010	11:48:12 AM	Bubbler valve closed
6/30/2010	11:48:12 AM	Helium MFC set to  0.000000
6/30/2010	11:48:12 AM	H2 MFC set to  0.000000
6/30/2010	11:48:12 AM	BCl3 MFC set to  0.000000
6/30/2010	11:48:12 AM	PHl3 MFC set to  0.000000
6/30/2010	11:48:12 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:48:12 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:48:12 AM	Tube furnace set to 0
6/30/2010	11:48:12 AM	Run finished at 11:48 AM
6/30/2010	11:48:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/30/2010	11:48:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	11:48:24 AM	Recipe started at 11:48 AM
6/30/2010	11:48:24 AM	Helium valve closed
6/30/2010	11:48:24 AM	H2 valve closed
6/30/2010	11:48:24 AM	BCl3 valve closed
6/30/2010	11:48:24 AM	PH3 valve closed
6/30/2010	11:48:24 AM	SiCl4 pre valve closed
6/30/2010	11:48:24 AM	SiCl4 post valve closed
6/30/2010	11:48:24 AM	Main Vac valve closed
6/30/2010	11:48:24 AM	Bubbler valve closed
6/30/2010	11:48:24 AM	Bypass valve opened
6/30/2010	11:48:24 AM	Helium MFC set to  0.000000
6/30/2010	11:48:24 AM	H2 MFC set to  0.000000
6/30/2010	11:48:24 AM	BCl3 MFC set to  0.000000
6/30/2010	11:48:24 AM	PHl3 MFC set to  0.000000
6/30/2010	11:48:24 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:48:24 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:48:24 AM	Tube furnace set to 0
6/30/2010	11:48:25 AM	Helium valve closed
6/30/2010	11:48:25 AM	H2 valve closed
6/30/2010	11:48:25 AM	BCl3 valve closed
6/30/2010	11:48:25 AM	PH3 valve closed
6/30/2010	11:48:25 AM	SiCl4 pre valve closed
6/30/2010	11:48:25 AM	SiCl4 post valve closed
6/30/2010	11:48:25 AM	Bubbler valve closed
6/30/2010	11:48:25 AM	Main Vac valve opened
6/30/2010	11:48:25 AM	Bypass valve opened
6/30/2010	11:48:25 AM	Helium MFC set to  0.000000
6/30/2010	11:48:25 AM	H2 MFC set to  0.000000
6/30/2010	11:48:25 AM	BCl3 MFC set to  0.000000
6/30/2010	11:48:25 AM	PHl3 MFC set to  0.000000
6/30/2010	11:48:25 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:48:25 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:48:25 AM	Tube furnace set to 0
6/30/2010	11:48:25 AM	Run finished at 11:48 AM
6/30/2010	11:48:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	11:48:43 AM	Recipe started at 11:48 AM
6/30/2010	11:48:43 AM	Helium valve closed
6/30/2010	11:48:43 AM	BCl3 valve closed
6/30/2010	11:48:43 AM	PH3 valve closed
6/30/2010	11:48:43 AM	SiCl4 pre valve closed
6/30/2010	11:48:43 AM	SiCl4 post valve closed
6/30/2010	11:48:43 AM	Main Vac valve closed
6/30/2010	11:48:43 AM	Bypass valve closed
6/30/2010	11:48:43 AM	Bubbler valve closed
6/30/2010	11:48:43 AM	H2 valve opened
6/30/2010	11:48:43 AM	Helium MFC set to  0.000000
6/30/2010	11:48:43 AM	H2 MFC set to  500.000000
6/30/2010	11:48:43 AM	BCl3 MFC set to  0.000000
6/30/2010	11:48:43 AM	PHl3 MFC set to  0.000000
6/30/2010	11:48:43 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:48:43 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:48:43 AM	Tube furnace set to 0
6/30/2010	11:50:02 AM	Helium valve closed
6/30/2010	11:50:02 AM	BCl3 valve closed
6/30/2010	11:50:02 AM	PH3 valve closed
6/30/2010	11:50:02 AM	SiCl4 pre valve closed
6/30/2010	11:50:02 AM	SiCl4 post valve closed
6/30/2010	11:50:02 AM	Main Vac valve closed
6/30/2010	11:50:02 AM	Bypass valve closed
6/30/2010	11:50:02 AM	H2 valve opened
6/30/2010	11:50:02 AM	Bubbler valve opened
6/30/2010	11:50:02 AM	Helium MFC set to  0.000000
6/30/2010	11:50:02 AM	H2 MFC set to  500.000000
6/30/2010	11:50:02 AM	BCl3 MFC set to  0.000000
6/30/2010	11:50:02 AM	PHl3 MFC set to  0.000000
6/30/2010	11:50:02 AM	SiCl4 MFC set to  0.000000
6/30/2010	11:50:02 AM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:50:03 AM	Tube furnace set to 1000
6/30/2010	12:10:03 PM	Helium valve closed
6/30/2010	12:10:03 PM	PH3 valve closed
6/30/2010	12:10:03 PM	Main Vac valve closed
6/30/2010	12:10:03 PM	Bypass valve closed
6/30/2010	12:10:03 PM	H2 valve opened
6/30/2010	12:10:03 PM	BCl3 valve opened
6/30/2010	12:10:03 PM	SiCl4 pre valve opened
6/30/2010	12:10:03 PM	SiCl4 post valve opened
6/30/2010	12:10:03 PM	Bubbler valve opened
6/30/2010	12:10:03 PM	Helium MFC set to  0.000000
6/30/2010	12:10:03 PM	H2 MFC set to  500.000000
6/30/2010	12:10:03 PM	BCl3 MFC set to  12.000000
6/30/2010	12:10:03 PM	PHl3 MFC set to  0.000000
6/30/2010	12:10:03 PM	SiCl4 MFC set to  50.000000
6/30/2010	12:10:03 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:10:03 PM	Tube furnace set to 1000
6/30/2010	12:25:03 PM	H2 valve closed
6/30/2010	12:25:03 PM	BCl3 valve closed
6/30/2010	12:25:03 PM	PH3 valve closed
6/30/2010	12:25:03 PM	SiCl4 pre valve closed
6/30/2010	12:25:03 PM	SiCl4 post valve closed
6/30/2010	12:25:03 PM	Main Vac valve closed
6/30/2010	12:25:03 PM	Bypass valve closed
6/30/2010	12:25:03 PM	Helium valve opened
6/30/2010	12:25:03 PM	Bubbler valve opened
6/30/2010	12:25:03 PM	Helium MFC set to  500.000000
6/30/2010	12:25:03 PM	H2 MFC set to  0.000000
6/30/2010	12:25:03 PM	BCl3 MFC set to  0.000000
6/30/2010	12:25:03 PM	PHl3 MFC set to  0.000000
6/30/2010	12:25:03 PM	SiCl4 MFC set to  0.000000
6/30/2010	12:25:03 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:25:03 PM	Tube furnace set to 0
6/30/2010	12:45:03 PM	Helium valve closed
6/30/2010	12:45:03 PM	H2 valve closed
6/30/2010	12:45:03 PM	BCl3 valve closed
6/30/2010	12:45:03 PM	PH3 valve closed
6/30/2010	12:45:03 PM	SiCl4 pre valve closed
6/30/2010	12:45:03 PM	SiCl4 post valve closed
6/30/2010	12:45:03 PM	Main Vac valve closed
6/30/2010	12:45:03 PM	Bypass valve closed
6/30/2010	12:45:03 PM	Bubbler valve closed
6/30/2010	12:45:03 PM	Helium MFC set to  0.000000
6/30/2010	12:45:03 PM	H2 MFC set to  0.000000
6/30/2010	12:45:03 PM	BCl3 MFC set to  0.000000
6/30/2010	12:45:03 PM	PHl3 MFC set to  0.000000
6/30/2010	12:45:03 PM	SiCl4 MFC set to  0.000000
6/30/2010	12:45:03 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	12:45:03 PM	Tube furnace set to 0
6/30/2010	12:45:03 PM	Run finished at 12:45 PM
6/30/2010	1:13:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	1:13:23 PM	Recipe started at 1:13 PM
6/30/2010	1:13:23 PM	H2 valve closed
6/30/2010	1:13:23 PM	BCl3 valve closed
6/30/2010	1:13:23 PM	PH3 valve closed
6/30/2010	1:13:23 PM	SiCl4 pre valve closed
6/30/2010	1:13:23 PM	SiCl4 post valve closed
6/30/2010	1:13:23 PM	Main Vac valve closed
6/30/2010	1:13:23 PM	Bypass valve closed
6/30/2010	1:13:23 PM	Bubbler valve closed
6/30/2010	1:13:23 PM	Helium valve opened
6/30/2010	1:13:23 PM	Helium MFC set to  500.000000
6/30/2010	1:13:23 PM	H2 MFC set to  0.000000
6/30/2010	1:13:23 PM	BCl3 MFC set to  0.000000
6/30/2010	1:13:23 PM	PHl3 MFC set to  0.000000
6/30/2010	1:13:23 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:13:23 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:13:23 PM	Tube furnace set to 0
6/30/2010	1:13:32 PM	Helium valve closed
6/30/2010	1:13:32 PM	H2 valve closed
6/30/2010	1:13:32 PM	BCl3 valve closed
6/30/2010	1:13:32 PM	PH3 valve closed
6/30/2010	1:13:32 PM	SiCl4 pre valve closed
6/30/2010	1:13:32 PM	SiCl4 post valve closed
6/30/2010	1:13:32 PM	Main Vac valve closed
6/30/2010	1:13:32 PM	Bypass valve closed
6/30/2010	1:13:32 PM	Bubbler valve closed
6/30/2010	1:13:32 PM	Helium MFC set to  0.000000
6/30/2010	1:13:32 PM	H2 MFC set to  0.000000
6/30/2010	1:13:32 PM	BCl3 MFC set to  0.000000
6/30/2010	1:13:32 PM	PHl3 MFC set to  0.000000
6/30/2010	1:13:32 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:13:32 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:13:32 PM	Tube furnace set to 0
6/30/2010	1:13:32 PM	Run finished at 1:13 PM
6/30/2010	1:13:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	1:27:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	1:27:06 PM	Recipe started at 1:27 PM
6/30/2010	1:27:07 PM	Helium valve closed
6/30/2010	1:27:07 PM	H2 valve closed
6/30/2010	1:27:07 PM	BCl3 valve closed
6/30/2010	1:27:07 PM	PH3 valve closed
6/30/2010	1:27:07 PM	SiCl4 pre valve closed
6/30/2010	1:27:07 PM	SiCl4 post valve closed
6/30/2010	1:27:07 PM	Main Vac valve closed
6/30/2010	1:27:07 PM	Bubbler valve closed
6/30/2010	1:27:07 PM	Bypass valve opened
6/30/2010	1:27:07 PM	Helium MFC set to  0.000000
6/30/2010	1:27:07 PM	H2 MFC set to  0.000000
6/30/2010	1:27:07 PM	BCl3 MFC set to  0.000000
6/30/2010	1:27:07 PM	PHl3 MFC set to  0.000000
6/30/2010	1:27:07 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:27:07 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:27:07 PM	Tube furnace set to 0
6/30/2010	1:27:55 PM	Helium valve closed
6/30/2010	1:27:55 PM	H2 valve closed
6/30/2010	1:27:55 PM	BCl3 valve closed
6/30/2010	1:27:55 PM	PH3 valve closed
6/30/2010	1:27:55 PM	SiCl4 pre valve closed
6/30/2010	1:27:55 PM	SiCl4 post valve closed
6/30/2010	1:27:55 PM	Bubbler valve closed
6/30/2010	1:27:55 PM	Main Vac valve opened
6/30/2010	1:27:55 PM	Bypass valve opened
6/30/2010	1:27:55 PM	Helium MFC set to  0.000000
6/30/2010	1:27:55 PM	H2 MFC set to  0.000000
6/30/2010	1:27:55 PM	BCl3 MFC set to  0.000000
6/30/2010	1:27:55 PM	PHl3 MFC set to  0.000000
6/30/2010	1:27:55 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:27:55 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:27:56 PM	Tube furnace set to 0
6/30/2010	1:27:56 PM	Run finished at 1:27 PM
6/30/2010	1:27:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	1:28:50 PM	Recipe started at 1:28 PM
6/30/2010	1:28:50 PM	Helium valve closed
6/30/2010	1:28:50 PM	H2 valve closed
6/30/2010	1:28:50 PM	BCl3 valve closed
6/30/2010	1:28:50 PM	PH3 valve closed
6/30/2010	1:28:50 PM	SiCl4 pre valve closed
6/30/2010	1:28:50 PM	SiCl4 post valve closed
6/30/2010	1:28:50 PM	Main Vac valve closed
6/30/2010	1:28:50 PM	Bubbler valve closed
6/30/2010	1:28:50 PM	Bypass valve opened
6/30/2010	1:28:50 PM	Helium MFC set to  0.000000
6/30/2010	1:28:50 PM	H2 MFC set to  0.000000
6/30/2010	1:28:50 PM	BCl3 MFC set to  0.000000
6/30/2010	1:28:50 PM	PHl3 MFC set to  0.000000
6/30/2010	1:28:50 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:28:50 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:28:50 PM	Tube furnace set to 0
6/30/2010	1:28:51 PM	Helium valve closed
6/30/2010	1:28:51 PM	H2 valve closed
6/30/2010	1:28:51 PM	BCl3 valve closed
6/30/2010	1:28:51 PM	PH3 valve closed
6/30/2010	1:28:51 PM	SiCl4 pre valve closed
6/30/2010	1:28:51 PM	SiCl4 post valve closed
6/30/2010	1:28:51 PM	Bubbler valve closed
6/30/2010	1:28:51 PM	Main Vac valve opened
6/30/2010	1:28:51 PM	Bypass valve opened
6/30/2010	1:28:51 PM	Helium MFC set to  0.000000
6/30/2010	1:28:51 PM	H2 MFC set to  0.000000
6/30/2010	1:28:51 PM	BCl3 MFC set to  0.000000
6/30/2010	1:28:51 PM	PHl3 MFC set to  0.000000
6/30/2010	1:28:51 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:28:51 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:28:51 PM	Tube furnace set to 0
6/30/2010	1:29:51 PM	H2 valve closed
6/30/2010	1:29:51 PM	BCl3 valve closed
6/30/2010	1:29:51 PM	PH3 valve closed
6/30/2010	1:29:51 PM	SiCl4 pre valve closed
6/30/2010	1:29:51 PM	SiCl4 post valve closed
6/30/2010	1:29:51 PM	Bubbler valve closed
6/30/2010	1:29:51 PM	Helium valve opened
6/30/2010	1:29:51 PM	Main Vac valve opened
6/30/2010	1:29:51 PM	Bypass valve opened
6/30/2010	1:29:51 PM	Helium MFC set to  100.000000
6/30/2010	1:29:51 PM	H2 MFC set to  0.000000
6/30/2010	1:29:51 PM	BCl3 MFC set to  0.000000
6/30/2010	1:29:51 PM	PHl3 MFC set to  0.000000
6/30/2010	1:29:51 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:29:51 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:29:51 PM	Tube furnace set to 0
6/30/2010	1:38:51 PM	Helium valve closed
6/30/2010	1:38:51 PM	H2 valve closed
6/30/2010	1:38:51 PM	BCl3 valve closed
6/30/2010	1:38:51 PM	PH3 valve closed
6/30/2010	1:38:51 PM	SiCl4 pre valve closed
6/30/2010	1:38:51 PM	SiCl4 post valve closed
6/30/2010	1:38:51 PM	Bubbler valve closed
6/30/2010	1:38:51 PM	Main Vac valve opened
6/30/2010	1:38:51 PM	Bypass valve opened
6/30/2010	1:38:51 PM	Helium MFC set to  0.000000
6/30/2010	1:38:51 PM	H2 MFC set to  0.000000
6/30/2010	1:38:51 PM	BCl3 MFC set to  0.000000
6/30/2010	1:38:51 PM	PHl3 MFC set to  0.000000
6/30/2010	1:38:51 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:38:51 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:38:51 PM	Tube furnace set to 0
6/30/2010	1:39:51 PM	H2 valve closed
6/30/2010	1:39:51 PM	BCl3 valve closed
6/30/2010	1:39:51 PM	PH3 valve closed
6/30/2010	1:39:51 PM	SiCl4 pre valve closed
6/30/2010	1:39:51 PM	SiCl4 post valve closed
6/30/2010	1:39:51 PM	Bubbler valve closed
6/30/2010	1:39:51 PM	Helium valve opened
6/30/2010	1:39:51 PM	Main Vac valve opened
6/30/2010	1:39:51 PM	Bypass valve opened
6/30/2010	1:39:51 PM	Helium MFC set to  100.000000
6/30/2010	1:39:51 PM	H2 MFC set to  0.000000
6/30/2010	1:39:51 PM	BCl3 MFC set to  0.000000
6/30/2010	1:39:51 PM	PHl3 MFC set to  0.000000
6/30/2010	1:39:51 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:39:51 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:39:51 PM	Tube furnace set to 0
6/30/2010	1:48:51 PM	Helium valve closed
6/30/2010	1:48:51 PM	H2 valve closed
6/30/2010	1:48:51 PM	BCl3 valve closed
6/30/2010	1:48:51 PM	PH3 valve closed
6/30/2010	1:48:51 PM	SiCl4 pre valve closed
6/30/2010	1:48:51 PM	SiCl4 post valve closed
6/30/2010	1:48:51 PM	Bubbler valve closed
6/30/2010	1:48:51 PM	Main Vac valve opened
6/30/2010	1:48:51 PM	Bypass valve opened
6/30/2010	1:48:51 PM	Helium MFC set to  0.000000
6/30/2010	1:48:51 PM	H2 MFC set to  0.000000
6/30/2010	1:48:51 PM	BCl3 MFC set to  0.000000
6/30/2010	1:48:51 PM	PHl3 MFC set to  0.000000
6/30/2010	1:48:51 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:48:51 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:48:52 PM	Tube furnace set to 0
6/30/2010	1:49:52 PM	H2 valve closed
6/30/2010	1:49:52 PM	BCl3 valve closed
6/30/2010	1:49:52 PM	PH3 valve closed
6/30/2010	1:49:52 PM	SiCl4 pre valve closed
6/30/2010	1:49:52 PM	SiCl4 post valve closed
6/30/2010	1:49:52 PM	Bubbler valve closed
6/30/2010	1:49:52 PM	Helium valve opened
6/30/2010	1:49:52 PM	Main Vac valve opened
6/30/2010	1:49:52 PM	Bypass valve opened
6/30/2010	1:49:52 PM	Helium MFC set to  100.000000
6/30/2010	1:49:52 PM	H2 MFC set to  0.000000
6/30/2010	1:49:52 PM	BCl3 MFC set to  0.000000
6/30/2010	1:49:52 PM	PHl3 MFC set to  0.000000
6/30/2010	1:49:52 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:49:52 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:49:52 PM	Tube furnace set to 0
6/30/2010	1:58:52 PM	Helium valve closed
6/30/2010	1:58:52 PM	H2 valve closed
6/30/2010	1:58:52 PM	BCl3 valve closed
6/30/2010	1:58:52 PM	PH3 valve closed
6/30/2010	1:58:52 PM	SiCl4 pre valve closed
6/30/2010	1:58:52 PM	SiCl4 post valve closed
6/30/2010	1:58:52 PM	Bubbler valve closed
6/30/2010	1:58:52 PM	Main Vac valve opened
6/30/2010	1:58:52 PM	Bypass valve opened
6/30/2010	1:58:52 PM	Helium MFC set to  0.000000
6/30/2010	1:58:52 PM	H2 MFC set to  0.000000
6/30/2010	1:58:52 PM	BCl3 MFC set to  0.000000
6/30/2010	1:58:52 PM	PHl3 MFC set to  0.000000
6/30/2010	1:58:52 PM	SiCl4 MFC set to  0.000000
6/30/2010	1:58:52 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	1:58:52 PM	Tube furnace set to 0
6/30/2010	1:58:53 PM	Run finished at 1:58 PM
6/30/2010	2:08:41 PM	Recipe started at 2:08 PM
6/30/2010	2:08:41 PM	Helium valve closed
6/30/2010	2:08:41 PM	H2 valve closed
6/30/2010	2:08:41 PM	BCl3 valve closed
6/30/2010	2:08:41 PM	PH3 valve closed
6/30/2010	2:08:41 PM	SiCl4 pre valve closed
6/30/2010	2:08:41 PM	SiCl4 post valve closed
6/30/2010	2:08:41 PM	Main Vac valve closed
6/30/2010	2:08:41 PM	Bubbler valve closed
6/30/2010	2:08:41 PM	Bypass valve opened
6/30/2010	2:08:41 PM	Helium MFC set to  0.000000
6/30/2010	2:08:41 PM	H2 MFC set to  0.000000
6/30/2010	2:08:41 PM	BCl3 MFC set to  0.000000
6/30/2010	2:08:41 PM	PHl3 MFC set to  0.000000
6/30/2010	2:08:41 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:08:41 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:08:41 PM	Tube furnace set to 0
6/30/2010	2:08:42 PM	Helium valve closed
6/30/2010	2:08:42 PM	H2 valve closed
6/30/2010	2:08:42 PM	BCl3 valve closed
6/30/2010	2:08:42 PM	PH3 valve closed
6/30/2010	2:08:42 PM	SiCl4 pre valve closed
6/30/2010	2:08:42 PM	SiCl4 post valve closed
6/30/2010	2:08:42 PM	Bubbler valve closed
6/30/2010	2:08:42 PM	Main Vac valve opened
6/30/2010	2:08:42 PM	Bypass valve opened
6/30/2010	2:08:42 PM	Helium MFC set to  0.000000
6/30/2010	2:08:42 PM	H2 MFC set to  0.000000
6/30/2010	2:08:42 PM	BCl3 MFC set to  0.000000
6/30/2010	2:08:42 PM	PHl3 MFC set to  0.000000
6/30/2010	2:08:42 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:08:42 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:08:42 PM	Tube furnace set to 0
6/30/2010	2:09:42 PM	H2 valve closed
6/30/2010	2:09:42 PM	BCl3 valve closed
6/30/2010	2:09:42 PM	PH3 valve closed
6/30/2010	2:09:42 PM	SiCl4 pre valve closed
6/30/2010	2:09:42 PM	SiCl4 post valve closed
6/30/2010	2:09:42 PM	Bubbler valve closed
6/30/2010	2:09:42 PM	Helium valve opened
6/30/2010	2:09:42 PM	Main Vac valve opened
6/30/2010	2:09:42 PM	Bypass valve opened
6/30/2010	2:09:42 PM	Helium MFC set to  100.000000
6/30/2010	2:09:42 PM	H2 MFC set to  0.000000
6/30/2010	2:09:42 PM	BCl3 MFC set to  0.000000
6/30/2010	2:09:42 PM	PHl3 MFC set to  0.000000
6/30/2010	2:09:42 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:09:42 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:09:42 PM	Tube furnace set to 0
6/30/2010	2:18:42 PM	Helium valve closed
6/30/2010	2:18:42 PM	H2 valve closed
6/30/2010	2:18:42 PM	BCl3 valve closed
6/30/2010	2:18:42 PM	PH3 valve closed
6/30/2010	2:18:42 PM	SiCl4 pre valve closed
6/30/2010	2:18:42 PM	SiCl4 post valve closed
6/30/2010	2:18:42 PM	Bubbler valve closed
6/30/2010	2:18:42 PM	Main Vac valve opened
6/30/2010	2:18:42 PM	Bypass valve opened
6/30/2010	2:18:42 PM	Helium MFC set to  0.000000
6/30/2010	2:18:42 PM	H2 MFC set to  0.000000
6/30/2010	2:18:42 PM	BCl3 MFC set to  0.000000
6/30/2010	2:18:42 PM	PHl3 MFC set to  0.000000
6/30/2010	2:18:42 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:18:42 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:18:42 PM	Tube furnace set to 0
6/30/2010	2:19:42 PM	H2 valve closed
6/30/2010	2:19:42 PM	BCl3 valve closed
6/30/2010	2:19:42 PM	PH3 valve closed
6/30/2010	2:19:42 PM	SiCl4 pre valve closed
6/30/2010	2:19:42 PM	SiCl4 post valve closed
6/30/2010	2:19:42 PM	Bubbler valve closed
6/30/2010	2:19:42 PM	Helium valve opened
6/30/2010	2:19:42 PM	Main Vac valve opened
6/30/2010	2:19:42 PM	Bypass valve opened
6/30/2010	2:19:42 PM	Helium MFC set to  100.000000
6/30/2010	2:19:42 PM	H2 MFC set to  0.000000
6/30/2010	2:19:42 PM	BCl3 MFC set to  0.000000
6/30/2010	2:19:42 PM	PHl3 MFC set to  0.000000
6/30/2010	2:19:42 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:19:42 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:19:42 PM	Tube furnace set to 0
6/30/2010	2:28:42 PM	Helium valve closed
6/30/2010	2:28:42 PM	H2 valve closed
6/30/2010	2:28:42 PM	BCl3 valve closed
6/30/2010	2:28:42 PM	PH3 valve closed
6/30/2010	2:28:42 PM	SiCl4 pre valve closed
6/30/2010	2:28:42 PM	SiCl4 post valve closed
6/30/2010	2:28:42 PM	Bubbler valve closed
6/30/2010	2:28:42 PM	Main Vac valve opened
6/30/2010	2:28:42 PM	Bypass valve opened
6/30/2010	2:28:42 PM	Helium MFC set to  0.000000
6/30/2010	2:28:42 PM	H2 MFC set to  0.000000
6/30/2010	2:28:42 PM	BCl3 MFC set to  0.000000
6/30/2010	2:28:42 PM	PHl3 MFC set to  0.000000
6/30/2010	2:28:42 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:28:42 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:28:42 PM	Tube furnace set to 0
6/30/2010	2:29:43 PM	H2 valve closed
6/30/2010	2:29:43 PM	BCl3 valve closed
6/30/2010	2:29:43 PM	PH3 valve closed
6/30/2010	2:29:43 PM	SiCl4 pre valve closed
6/30/2010	2:29:43 PM	SiCl4 post valve closed
6/30/2010	2:29:43 PM	Bubbler valve closed
6/30/2010	2:29:43 PM	Helium valve opened
6/30/2010	2:29:43 PM	Main Vac valve opened
6/30/2010	2:29:43 PM	Bypass valve opened
6/30/2010	2:29:43 PM	Helium MFC set to  100.000000
6/30/2010	2:29:43 PM	H2 MFC set to  0.000000
6/30/2010	2:29:43 PM	BCl3 MFC set to  0.000000
6/30/2010	2:29:43 PM	PHl3 MFC set to  0.000000
6/30/2010	2:29:43 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:29:43 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:29:43 PM	Tube furnace set to 0
6/30/2010	2:38:43 PM	Helium valve closed
6/30/2010	2:38:43 PM	H2 valve closed
6/30/2010	2:38:43 PM	BCl3 valve closed
6/30/2010	2:38:43 PM	PH3 valve closed
6/30/2010	2:38:43 PM	SiCl4 pre valve closed
6/30/2010	2:38:43 PM	SiCl4 post valve closed
6/30/2010	2:38:43 PM	Bubbler valve closed
6/30/2010	2:38:43 PM	Main Vac valve opened
6/30/2010	2:38:43 PM	Bypass valve opened
6/30/2010	2:38:43 PM	Helium MFC set to  0.000000
6/30/2010	2:38:43 PM	H2 MFC set to  0.000000
6/30/2010	2:38:43 PM	BCl3 MFC set to  0.000000
6/30/2010	2:38:43 PM	PHl3 MFC set to  0.000000
6/30/2010	2:38:43 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:38:43 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:38:43 PM	Tube furnace set to 0
6/30/2010	2:38:44 PM	Run finished at 2:38 PM
6/30/2010	2:57:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/30/2010	2:57:17 PM	Recipe started at 2:57 PM
6/30/2010	2:57:17 PM	Helium valve closed
6/30/2010	2:57:17 PM	H2 valve closed
6/30/2010	2:57:17 PM	BCl3 valve closed
6/30/2010	2:57:17 PM	PH3 valve closed
6/30/2010	2:57:17 PM	SiCl4 pre valve closed
6/30/2010	2:57:17 PM	SiCl4 post valve closed
6/30/2010	2:57:17 PM	Main Vac valve closed
6/30/2010	2:57:17 PM	Bypass valve closed
6/30/2010	2:57:17 PM	Bubbler valve closed
6/30/2010	2:57:17 PM	Helium MFC set to  0.000000
6/30/2010	2:57:17 PM	H2 MFC set to  0.000000
6/30/2010	2:57:17 PM	BCl3 MFC set to  0.000000
6/30/2010	2:57:17 PM	PHl3 MFC set to  0.000000
6/30/2010	2:57:17 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:57:17 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:57:17 PM	Tube furnace set to 0
6/30/2010	2:57:18 PM	Run finished at 2:57 PM
6/30/2010	2:57:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/30/2010	2:57:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	2:57:32 PM	Recipe started at 2:57 PM
6/30/2010	2:57:32 PM	Helium valve closed
6/30/2010	2:57:32 PM	H2 valve closed
6/30/2010	2:57:32 PM	BCl3 valve closed
6/30/2010	2:57:32 PM	PH3 valve closed
6/30/2010	2:57:32 PM	SiCl4 pre valve closed
6/30/2010	2:57:32 PM	SiCl4 post valve closed
6/30/2010	2:57:32 PM	Main Vac valve closed
6/30/2010	2:57:32 PM	Bubbler valve closed
6/30/2010	2:57:32 PM	Bypass valve opened
6/30/2010	2:57:32 PM	Helium MFC set to  0.000000
6/30/2010	2:57:32 PM	H2 MFC set to  0.000000
6/30/2010	2:57:32 PM	BCl3 MFC set to  0.000000
6/30/2010	2:57:32 PM	PHl3 MFC set to  0.000000
6/30/2010	2:57:32 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:57:32 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:57:32 PM	Tube furnace set to 0
6/30/2010	2:57:32 PM	Helium valve closed
6/30/2010	2:57:32 PM	H2 valve closed
6/30/2010	2:57:32 PM	BCl3 valve closed
6/30/2010	2:57:32 PM	PH3 valve closed
6/30/2010	2:57:32 PM	SiCl4 pre valve closed
6/30/2010	2:57:32 PM	SiCl4 post valve closed
6/30/2010	2:57:32 PM	Bubbler valve closed
6/30/2010	2:57:32 PM	Main Vac valve opened
6/30/2010	2:57:32 PM	Bypass valve opened
6/30/2010	2:57:32 PM	Helium MFC set to  0.000000
6/30/2010	2:57:32 PM	H2 MFC set to  0.000000
6/30/2010	2:57:32 PM	BCl3 MFC set to  0.000000
6/30/2010	2:57:32 PM	PHl3 MFC set to  0.000000
6/30/2010	2:57:32 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:57:32 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:57:32 PM	Tube furnace set to 0
6/30/2010	2:57:32 PM	Run finished at 2:57 PM
6/30/2010	2:57:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	2:58:36 PM	Recipe started at 2:58 PM
6/30/2010	2:58:36 PM	Helium valve closed
6/30/2010	2:58:36 PM	BCl3 valve closed
6/30/2010	2:58:36 PM	PH3 valve closed
6/30/2010	2:58:36 PM	SiCl4 pre valve closed
6/30/2010	2:58:36 PM	SiCl4 post valve closed
6/30/2010	2:58:36 PM	Main Vac valve closed
6/30/2010	2:58:36 PM	Bypass valve closed
6/30/2010	2:58:36 PM	Bubbler valve closed
6/30/2010	2:58:36 PM	H2 valve opened
6/30/2010	2:58:36 PM	Helium MFC set to  0.000000
6/30/2010	2:58:36 PM	H2 MFC set to  500.000000
6/30/2010	2:58:36 PM	BCl3 MFC set to  0.000000
6/30/2010	2:58:36 PM	PHl3 MFC set to  0.000000
6/30/2010	2:58:36 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:58:36 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:58:36 PM	Tube furnace set to 0
6/30/2010	2:59:57 PM	Helium valve closed
6/30/2010	2:59:57 PM	BCl3 valve closed
6/30/2010	2:59:57 PM	PH3 valve closed
6/30/2010	2:59:57 PM	SiCl4 pre valve closed
6/30/2010	2:59:57 PM	SiCl4 post valve closed
6/30/2010	2:59:57 PM	Main Vac valve closed
6/30/2010	2:59:57 PM	Bypass valve closed
6/30/2010	2:59:57 PM	H2 valve opened
6/30/2010	2:59:57 PM	Bubbler valve opened
6/30/2010	2:59:57 PM	Helium MFC set to  0.000000
6/30/2010	2:59:57 PM	H2 MFC set to  500.000000
6/30/2010	2:59:57 PM	BCl3 MFC set to  0.000000
6/30/2010	2:59:57 PM	PHl3 MFC set to  0.000000
6/30/2010	2:59:57 PM	SiCl4 MFC set to  0.000000
6/30/2010	2:59:57 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	2:59:57 PM	Tube furnace set to 1000
6/30/2010	3:19:57 PM	Helium valve closed
6/30/2010	3:19:57 PM	PH3 valve closed
6/30/2010	3:19:57 PM	Main Vac valve closed
6/30/2010	3:19:57 PM	Bypass valve closed
6/30/2010	3:19:57 PM	H2 valve opened
6/30/2010	3:19:57 PM	BCl3 valve opened
6/30/2010	3:19:57 PM	SiCl4 pre valve opened
6/30/2010	3:19:57 PM	SiCl4 post valve opened
6/30/2010	3:19:57 PM	Bubbler valve opened
6/30/2010	3:19:57 PM	Helium MFC set to  0.000000
6/30/2010	3:19:57 PM	H2 MFC set to  500.000000
6/30/2010	3:19:57 PM	BCl3 MFC set to  12.000000
6/30/2010	3:19:57 PM	PHl3 MFC set to  0.000000
6/30/2010	3:19:57 PM	SiCl4 MFC set to  50.000000
6/30/2010	3:19:57 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	3:19:57 PM	Tube furnace set to 1000
6/30/2010	3:34:57 PM	H2 valve closed
6/30/2010	3:34:57 PM	BCl3 valve closed
6/30/2010	3:34:57 PM	PH3 valve closed
6/30/2010	3:34:57 PM	SiCl4 pre valve closed
6/30/2010	3:34:57 PM	SiCl4 post valve closed
6/30/2010	3:34:57 PM	Main Vac valve closed
6/30/2010	3:34:57 PM	Bypass valve closed
6/30/2010	3:34:57 PM	Helium valve opened
6/30/2010	3:34:57 PM	Bubbler valve opened
6/30/2010	3:34:57 PM	Helium MFC set to  500.000000
6/30/2010	3:34:57 PM	H2 MFC set to  0.000000
6/30/2010	3:34:57 PM	BCl3 MFC set to  0.000000
6/30/2010	3:34:57 PM	PHl3 MFC set to  0.000000
6/30/2010	3:34:57 PM	SiCl4 MFC set to  0.000000
6/30/2010	3:34:57 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	3:34:57 PM	Tube furnace set to 0
6/30/2010	3:54:57 PM	Helium valve closed
6/30/2010	3:54:57 PM	H2 valve closed
6/30/2010	3:54:57 PM	BCl3 valve closed
6/30/2010	3:54:57 PM	PH3 valve closed
6/30/2010	3:54:57 PM	SiCl4 pre valve closed
6/30/2010	3:54:57 PM	SiCl4 post valve closed
6/30/2010	3:54:57 PM	Main Vac valve closed
6/30/2010	3:54:57 PM	Bypass valve closed
6/30/2010	3:54:57 PM	Bubbler valve closed
6/30/2010	3:54:57 PM	Helium MFC set to  0.000000
6/30/2010	3:54:57 PM	H2 MFC set to  0.000000
6/30/2010	3:54:57 PM	BCl3 MFC set to  0.000000
6/30/2010	3:54:57 PM	PHl3 MFC set to  0.000000
6/30/2010	3:54:57 PM	SiCl4 MFC set to  0.000000
6/30/2010	3:54:57 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	3:54:58 PM	Tube furnace set to 0
6/30/2010	3:54:58 PM	Run finished at 3:54 PM
6/30/2010	4:38:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	4:38:45 PM	Recipe started at 4:38 PM
6/30/2010	4:38:45 PM	H2 valve closed
6/30/2010	4:38:45 PM	BCl3 valve closed
6/30/2010	4:38:45 PM	PH3 valve closed
6/30/2010	4:38:45 PM	SiCl4 pre valve closed
6/30/2010	4:38:45 PM	SiCl4 post valve closed
6/30/2010	4:38:45 PM	Main Vac valve closed
6/30/2010	4:38:45 PM	Bypass valve closed
6/30/2010	4:38:45 PM	Bubbler valve closed
6/30/2010	4:38:45 PM	Helium valve opened
6/30/2010	4:38:45 PM	Helium MFC set to  500.000000
6/30/2010	4:38:45 PM	H2 MFC set to  0.000000
6/30/2010	4:38:45 PM	BCl3 MFC set to  0.000000
6/30/2010	4:38:45 PM	PHl3 MFC set to  0.000000
6/30/2010	4:38:45 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:38:45 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:38:45 PM	Tube furnace set to 0
6/30/2010	4:38:52 PM	Helium valve closed
6/30/2010	4:38:52 PM	H2 valve closed
6/30/2010	4:38:52 PM	BCl3 valve closed
6/30/2010	4:38:52 PM	PH3 valve closed
6/30/2010	4:38:52 PM	SiCl4 pre valve closed
6/30/2010	4:38:52 PM	SiCl4 post valve closed
6/30/2010	4:38:52 PM	Main Vac valve closed
6/30/2010	4:38:52 PM	Bypass valve closed
6/30/2010	4:38:52 PM	Bubbler valve closed
6/30/2010	4:38:52 PM	Helium MFC set to  0.000000
6/30/2010	4:38:52 PM	H2 MFC set to  0.000000
6/30/2010	4:38:52 PM	BCl3 MFC set to  0.000000
6/30/2010	4:38:52 PM	PHl3 MFC set to  0.000000
6/30/2010	4:38:52 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:38:52 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:38:52 PM	Tube furnace set to 0
6/30/2010	4:38:52 PM	Run finished at 4:38 PM
6/30/2010	4:38:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	4:47:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	4:47:16 PM	Recipe started at 4:47 PM
6/30/2010	4:47:16 PM	Helium valve closed
6/30/2010	4:47:16 PM	H2 valve closed
6/30/2010	4:47:16 PM	BCl3 valve closed
6/30/2010	4:47:16 PM	PH3 valve closed
6/30/2010	4:47:16 PM	SiCl4 pre valve closed
6/30/2010	4:47:16 PM	SiCl4 post valve closed
6/30/2010	4:47:16 PM	Main Vac valve closed
6/30/2010	4:47:16 PM	Bubbler valve closed
6/30/2010	4:47:16 PM	Bypass valve opened
6/30/2010	4:47:16 PM	Helium MFC set to  0.000000
6/30/2010	4:47:16 PM	H2 MFC set to  0.000000
6/30/2010	4:47:16 PM	BCl3 MFC set to  0.000000
6/30/2010	4:47:16 PM	PHl3 MFC set to  0.000000
6/30/2010	4:47:16 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:47:16 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:47:16 PM	Tube furnace set to 0
6/30/2010	4:48:05 PM	Helium valve closed
6/30/2010	4:48:05 PM	H2 valve closed
6/30/2010	4:48:05 PM	BCl3 valve closed
6/30/2010	4:48:05 PM	PH3 valve closed
6/30/2010	4:48:05 PM	SiCl4 pre valve closed
6/30/2010	4:48:05 PM	SiCl4 post valve closed
6/30/2010	4:48:05 PM	Bubbler valve closed
6/30/2010	4:48:05 PM	Main Vac valve opened
6/30/2010	4:48:05 PM	Bypass valve opened
6/30/2010	4:48:05 PM	Helium MFC set to  0.000000
6/30/2010	4:48:05 PM	H2 MFC set to  0.000000
6/30/2010	4:48:05 PM	BCl3 MFC set to  0.000000
6/30/2010	4:48:05 PM	PHl3 MFC set to  0.000000
6/30/2010	4:48:05 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:48:05 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:48:05 PM	Tube furnace set to 0
6/30/2010	4:48:05 PM	Run finished at 4:48 PM
6/30/2010	4:48:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	4:48:14 PM	Recipe started at 4:48 PM
6/30/2010	4:48:14 PM	Helium valve closed
6/30/2010	4:48:14 PM	H2 valve closed
6/30/2010	4:48:14 PM	BCl3 valve closed
6/30/2010	4:48:14 PM	PH3 valve closed
6/30/2010	4:48:14 PM	SiCl4 pre valve closed
6/30/2010	4:48:14 PM	SiCl4 post valve closed
6/30/2010	4:48:14 PM	Main Vac valve closed
6/30/2010	4:48:14 PM	Bubbler valve closed
6/30/2010	4:48:14 PM	Bypass valve opened
6/30/2010	4:48:14 PM	Helium MFC set to  0.000000
6/30/2010	4:48:14 PM	H2 MFC set to  0.000000
6/30/2010	4:48:14 PM	BCl3 MFC set to  0.000000
6/30/2010	4:48:14 PM	PHl3 MFC set to  0.000000
6/30/2010	4:48:14 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:48:14 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:48:14 PM	Tube furnace set to 0
6/30/2010	4:48:15 PM	Helium valve closed
6/30/2010	4:48:15 PM	H2 valve closed
6/30/2010	4:48:15 PM	BCl3 valve closed
6/30/2010	4:48:15 PM	PH3 valve closed
6/30/2010	4:48:15 PM	SiCl4 pre valve closed
6/30/2010	4:48:15 PM	SiCl4 post valve closed
6/30/2010	4:48:15 PM	Bubbler valve closed
6/30/2010	4:48:15 PM	Main Vac valve opened
6/30/2010	4:48:15 PM	Bypass valve opened
6/30/2010	4:48:15 PM	Helium MFC set to  0.000000
6/30/2010	4:48:15 PM	H2 MFC set to  0.000000
6/30/2010	4:48:15 PM	BCl3 MFC set to  0.000000
6/30/2010	4:48:15 PM	PHl3 MFC set to  0.000000
6/30/2010	4:48:15 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:48:15 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:48:15 PM	Tube furnace set to 0
6/30/2010	4:49:15 PM	H2 valve closed
6/30/2010	4:49:15 PM	BCl3 valve closed
6/30/2010	4:49:15 PM	PH3 valve closed
6/30/2010	4:49:15 PM	SiCl4 pre valve closed
6/30/2010	4:49:15 PM	SiCl4 post valve closed
6/30/2010	4:49:15 PM	Bubbler valve closed
6/30/2010	4:49:15 PM	Helium valve opened
6/30/2010	4:49:15 PM	Main Vac valve opened
6/30/2010	4:49:15 PM	Bypass valve opened
6/30/2010	4:49:15 PM	Helium MFC set to  100.000000
6/30/2010	4:49:15 PM	H2 MFC set to  0.000000
6/30/2010	4:49:15 PM	BCl3 MFC set to  0.000000
6/30/2010	4:49:15 PM	PHl3 MFC set to  0.000000
6/30/2010	4:49:15 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:49:15 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:49:15 PM	Tube furnace set to 0
6/30/2010	4:58:15 PM	Helium valve closed
6/30/2010	4:58:15 PM	H2 valve closed
6/30/2010	4:58:15 PM	BCl3 valve closed
6/30/2010	4:58:15 PM	PH3 valve closed
6/30/2010	4:58:15 PM	SiCl4 pre valve closed
6/30/2010	4:58:15 PM	SiCl4 post valve closed
6/30/2010	4:58:15 PM	Bubbler valve closed
6/30/2010	4:58:15 PM	Main Vac valve opened
6/30/2010	4:58:15 PM	Bypass valve opened
6/30/2010	4:58:15 PM	Helium MFC set to  0.000000
6/30/2010	4:58:15 PM	H2 MFC set to  0.000000
6/30/2010	4:58:15 PM	BCl3 MFC set to  0.000000
6/30/2010	4:58:15 PM	PHl3 MFC set to  0.000000
6/30/2010	4:58:15 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:58:15 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:58:15 PM	Tube furnace set to 0
6/30/2010	4:59:15 PM	H2 valve closed
6/30/2010	4:59:15 PM	BCl3 valve closed
6/30/2010	4:59:15 PM	PH3 valve closed
6/30/2010	4:59:15 PM	SiCl4 pre valve closed
6/30/2010	4:59:15 PM	SiCl4 post valve closed
6/30/2010	4:59:15 PM	Bubbler valve closed
6/30/2010	4:59:15 PM	Helium valve opened
6/30/2010	4:59:15 PM	Main Vac valve opened
6/30/2010	4:59:15 PM	Bypass valve opened
6/30/2010	4:59:15 PM	Helium MFC set to  100.000000
6/30/2010	4:59:15 PM	H2 MFC set to  0.000000
6/30/2010	4:59:15 PM	BCl3 MFC set to  0.000000
6/30/2010	4:59:15 PM	PHl3 MFC set to  0.000000
6/30/2010	4:59:15 PM	SiCl4 MFC set to  0.000000
6/30/2010	4:59:15 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	4:59:15 PM	Tube furnace set to 0
6/30/2010	5:08:15 PM	Helium valve closed
6/30/2010	5:08:15 PM	H2 valve closed
6/30/2010	5:08:15 PM	BCl3 valve closed
6/30/2010	5:08:15 PM	PH3 valve closed
6/30/2010	5:08:15 PM	SiCl4 pre valve closed
6/30/2010	5:08:15 PM	SiCl4 post valve closed
6/30/2010	5:08:15 PM	Bubbler valve closed
6/30/2010	5:08:15 PM	Main Vac valve opened
6/30/2010	5:08:15 PM	Bypass valve opened
6/30/2010	5:08:15 PM	Helium MFC set to  0.000000
6/30/2010	5:08:15 PM	H2 MFC set to  0.000000
6/30/2010	5:08:15 PM	BCl3 MFC set to  0.000000
6/30/2010	5:08:15 PM	PHl3 MFC set to  0.000000
6/30/2010	5:08:15 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:08:15 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:08:15 PM	Tube furnace set to 0
6/30/2010	5:09:15 PM	H2 valve closed
6/30/2010	5:09:15 PM	BCl3 valve closed
6/30/2010	5:09:15 PM	PH3 valve closed
6/30/2010	5:09:15 PM	SiCl4 pre valve closed
6/30/2010	5:09:15 PM	SiCl4 post valve closed
6/30/2010	5:09:15 PM	Bubbler valve closed
6/30/2010	5:09:15 PM	Helium valve opened
6/30/2010	5:09:15 PM	Main Vac valve opened
6/30/2010	5:09:15 PM	Bypass valve opened
6/30/2010	5:09:15 PM	Helium MFC set to  100.000000
6/30/2010	5:09:15 PM	H2 MFC set to  0.000000
6/30/2010	5:09:15 PM	BCl3 MFC set to  0.000000
6/30/2010	5:09:15 PM	PHl3 MFC set to  0.000000
6/30/2010	5:09:15 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:09:15 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:09:16 PM	Tube furnace set to 0
6/30/2010	5:18:16 PM	Helium valve closed
6/30/2010	5:18:16 PM	H2 valve closed
6/30/2010	5:18:16 PM	BCl3 valve closed
6/30/2010	5:18:16 PM	PH3 valve closed
6/30/2010	5:18:16 PM	SiCl4 pre valve closed
6/30/2010	5:18:16 PM	SiCl4 post valve closed
6/30/2010	5:18:16 PM	Bubbler valve closed
6/30/2010	5:18:16 PM	Main Vac valve opened
6/30/2010	5:18:16 PM	Bypass valve opened
6/30/2010	5:18:16 PM	Helium MFC set to  0.000000
6/30/2010	5:18:16 PM	H2 MFC set to  0.000000
6/30/2010	5:18:16 PM	BCl3 MFC set to  0.000000
6/30/2010	5:18:16 PM	PHl3 MFC set to  0.000000
6/30/2010	5:18:16 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:18:16 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:18:16 PM	Tube furnace set to 0
6/30/2010	5:18:17 PM	Run finished at 5:18 PM
6/30/2010	5:26:29 PM	Recipe started at 5:26 PM
6/30/2010	5:26:29 PM	Helium valve closed
6/30/2010	5:26:29 PM	H2 valve closed
6/30/2010	5:26:29 PM	BCl3 valve closed
6/30/2010	5:26:29 PM	PH3 valve closed
6/30/2010	5:26:29 PM	SiCl4 pre valve closed
6/30/2010	5:26:29 PM	SiCl4 post valve closed
6/30/2010	5:26:29 PM	Main Vac valve closed
6/30/2010	5:26:29 PM	Bubbler valve closed
6/30/2010	5:26:29 PM	Bypass valve opened
6/30/2010	5:26:29 PM	Helium MFC set to  0.000000
6/30/2010	5:26:29 PM	H2 MFC set to  0.000000
6/30/2010	5:26:29 PM	BCl3 MFC set to  0.000000
6/30/2010	5:26:29 PM	PHl3 MFC set to  0.000000
6/30/2010	5:26:29 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:26:29 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:26:30 PM	Tube furnace set to 0
6/30/2010	5:26:30 PM	Helium valve closed
6/30/2010	5:26:30 PM	H2 valve closed
6/30/2010	5:26:30 PM	BCl3 valve closed
6/30/2010	5:26:30 PM	PH3 valve closed
6/30/2010	5:26:30 PM	SiCl4 pre valve closed
6/30/2010	5:26:30 PM	SiCl4 post valve closed
6/30/2010	5:26:30 PM	Bubbler valve closed
6/30/2010	5:26:30 PM	Main Vac valve opened
6/30/2010	5:26:30 PM	Bypass valve opened
6/30/2010	5:26:30 PM	Helium MFC set to  0.000000
6/30/2010	5:26:30 PM	H2 MFC set to  0.000000
6/30/2010	5:26:30 PM	BCl3 MFC set to  0.000000
6/30/2010	5:26:30 PM	PHl3 MFC set to  0.000000
6/30/2010	5:26:30 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:26:30 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:26:30 PM	Tube furnace set to 0
6/30/2010	5:27:30 PM	H2 valve closed
6/30/2010	5:27:30 PM	BCl3 valve closed
6/30/2010	5:27:30 PM	PH3 valve closed
6/30/2010	5:27:30 PM	SiCl4 pre valve closed
6/30/2010	5:27:30 PM	SiCl4 post valve closed
6/30/2010	5:27:30 PM	Bubbler valve closed
6/30/2010	5:27:30 PM	Helium valve opened
6/30/2010	5:27:30 PM	Main Vac valve opened
6/30/2010	5:27:30 PM	Bypass valve opened
6/30/2010	5:27:30 PM	Helium MFC set to  100.000000
6/30/2010	5:27:30 PM	H2 MFC set to  0.000000
6/30/2010	5:27:30 PM	BCl3 MFC set to  0.000000
6/30/2010	5:27:30 PM	PHl3 MFC set to  0.000000
6/30/2010	5:27:30 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:27:30 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:27:30 PM	Tube furnace set to 0
6/30/2010	5:36:30 PM	Helium valve closed
6/30/2010	5:36:30 PM	H2 valve closed
6/30/2010	5:36:30 PM	BCl3 valve closed
6/30/2010	5:36:30 PM	PH3 valve closed
6/30/2010	5:36:30 PM	SiCl4 pre valve closed
6/30/2010	5:36:30 PM	SiCl4 post valve closed
6/30/2010	5:36:30 PM	Bubbler valve closed
6/30/2010	5:36:30 PM	Main Vac valve opened
6/30/2010	5:36:30 PM	Bypass valve opened
6/30/2010	5:36:30 PM	Helium MFC set to  0.000000
6/30/2010	5:36:30 PM	H2 MFC set to  0.000000
6/30/2010	5:36:30 PM	BCl3 MFC set to  0.000000
6/30/2010	5:36:30 PM	PHl3 MFC set to  0.000000
6/30/2010	5:36:30 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:36:30 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:36:30 PM	Tube furnace set to 0
6/30/2010	5:37:30 PM	H2 valve closed
6/30/2010	5:37:30 PM	BCl3 valve closed
6/30/2010	5:37:30 PM	PH3 valve closed
6/30/2010	5:37:30 PM	SiCl4 pre valve closed
6/30/2010	5:37:30 PM	SiCl4 post valve closed
6/30/2010	5:37:30 PM	Bubbler valve closed
6/30/2010	5:37:30 PM	Helium valve opened
6/30/2010	5:37:30 PM	Main Vac valve opened
6/30/2010	5:37:30 PM	Bypass valve opened
6/30/2010	5:37:30 PM	Helium MFC set to  100.000000
6/30/2010	5:37:30 PM	H2 MFC set to  0.000000
6/30/2010	5:37:30 PM	BCl3 MFC set to  0.000000
6/30/2010	5:37:30 PM	PHl3 MFC set to  0.000000
6/30/2010	5:37:30 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:37:30 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:37:31 PM	Tube furnace set to 0
6/30/2010	5:46:31 PM	Helium valve closed
6/30/2010	5:46:31 PM	H2 valve closed
6/30/2010	5:46:31 PM	BCl3 valve closed
6/30/2010	5:46:31 PM	PH3 valve closed
6/30/2010	5:46:31 PM	SiCl4 pre valve closed
6/30/2010	5:46:31 PM	SiCl4 post valve closed
6/30/2010	5:46:31 PM	Bubbler valve closed
6/30/2010	5:46:31 PM	Main Vac valve opened
6/30/2010	5:46:31 PM	Bypass valve opened
6/30/2010	5:46:31 PM	Helium MFC set to  0.000000
6/30/2010	5:46:31 PM	H2 MFC set to  0.000000
6/30/2010	5:46:31 PM	BCl3 MFC set to  0.000000
6/30/2010	5:46:31 PM	PHl3 MFC set to  0.000000
6/30/2010	5:46:31 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:46:31 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:46:31 PM	Tube furnace set to 0
6/30/2010	5:47:31 PM	H2 valve closed
6/30/2010	5:47:31 PM	BCl3 valve closed
6/30/2010	5:47:31 PM	PH3 valve closed
6/30/2010	5:47:31 PM	SiCl4 pre valve closed
6/30/2010	5:47:31 PM	SiCl4 post valve closed
6/30/2010	5:47:31 PM	Bubbler valve closed
6/30/2010	5:47:31 PM	Helium valve opened
6/30/2010	5:47:31 PM	Main Vac valve opened
6/30/2010	5:47:31 PM	Bypass valve opened
6/30/2010	5:47:31 PM	Helium MFC set to  100.000000
6/30/2010	5:47:31 PM	H2 MFC set to  0.000000
6/30/2010	5:47:31 PM	BCl3 MFC set to  0.000000
6/30/2010	5:47:31 PM	PHl3 MFC set to  0.000000
6/30/2010	5:47:31 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:47:31 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:47:31 PM	Tube furnace set to 0
6/30/2010	5:55:41 PM	Helium valve closed
6/30/2010	5:55:41 PM	H2 valve closed
6/30/2010	5:55:41 PM	BCl3 valve closed
6/30/2010	5:55:41 PM	PH3 valve closed
6/30/2010	5:55:41 PM	SiCl4 pre valve closed
6/30/2010	5:55:41 PM	SiCl4 post valve closed
6/30/2010	5:55:41 PM	Bubbler valve closed
6/30/2010	5:55:41 PM	Main Vac valve opened
6/30/2010	5:55:41 PM	Bypass valve opened
6/30/2010	5:55:41 PM	Helium MFC set to  0.000000
6/30/2010	5:55:41 PM	H2 MFC set to  0.000000
6/30/2010	5:55:41 PM	BCl3 MFC set to  0.000000
6/30/2010	5:55:41 PM	PHl3 MFC set to  0.000000
6/30/2010	5:55:41 PM	SiCl4 MFC set to  0.000000
6/30/2010	5:55:41 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	5:55:41 PM	Tube furnace set to 0
6/30/2010	5:55:42 PM	Run finished at 5:55 PM
6/30/2010	6:00:41 PM	Recipe started at 6:00 PM
6/30/2010	6:00:41 PM	Helium valve closed
6/30/2010	6:00:41 PM	BCl3 valve closed
6/30/2010	6:00:41 PM	PH3 valve closed
6/30/2010	6:00:41 PM	SiCl4 pre valve closed
6/30/2010	6:00:41 PM	SiCl4 post valve closed
6/30/2010	6:00:41 PM	Main Vac valve closed
6/30/2010	6:00:41 PM	Bypass valve closed
6/30/2010	6:00:41 PM	Bubbler valve closed
6/30/2010	6:00:41 PM	H2 valve opened
6/30/2010	6:00:41 PM	Helium MFC set to  0.000000
6/30/2010	6:00:41 PM	H2 MFC set to  500.000000
6/30/2010	6:00:41 PM	BCl3 MFC set to  0.000000
6/30/2010	6:00:41 PM	PHl3 MFC set to  0.000000
6/30/2010	6:00:41 PM	SiCl4 MFC set to  0.000000
6/30/2010	6:00:41 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	6:00:41 PM	Tube furnace set to 0
6/30/2010	6:02:02 PM	Helium valve closed
6/30/2010	6:02:02 PM	BCl3 valve closed
6/30/2010	6:02:02 PM	PH3 valve closed
6/30/2010	6:02:02 PM	SiCl4 pre valve closed
6/30/2010	6:02:02 PM	SiCl4 post valve closed
6/30/2010	6:02:02 PM	Main Vac valve closed
6/30/2010	6:02:02 PM	Bypass valve closed
6/30/2010	6:02:02 PM	H2 valve opened
6/30/2010	6:02:02 PM	Bubbler valve opened
6/30/2010	6:02:02 PM	Helium MFC set to  0.000000
6/30/2010	6:02:02 PM	H2 MFC set to  500.000000
6/30/2010	6:02:02 PM	BCl3 MFC set to  0.000000
6/30/2010	6:02:02 PM	PHl3 MFC set to  0.000000
6/30/2010	6:02:02 PM	SiCl4 MFC set to  0.000000
6/30/2010	6:02:02 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	6:02:02 PM	Tube furnace set to 1000
6/30/2010	6:22:02 PM	Helium valve closed
6/30/2010	6:22:02 PM	PH3 valve closed
6/30/2010	6:22:02 PM	Main Vac valve closed
6/30/2010	6:22:02 PM	Bypass valve closed
6/30/2010	6:22:02 PM	H2 valve opened
6/30/2010	6:22:02 PM	BCl3 valve opened
6/30/2010	6:22:02 PM	SiCl4 pre valve opened
6/30/2010	6:22:02 PM	SiCl4 post valve opened
6/30/2010	6:22:02 PM	Bubbler valve opened
6/30/2010	6:22:02 PM	Helium MFC set to  0.000000
6/30/2010	6:22:02 PM	H2 MFC set to  500.000000
6/30/2010	6:22:02 PM	BCl3 MFC set to  12.000000
6/30/2010	6:22:02 PM	PHl3 MFC set to  0.000000
6/30/2010	6:22:02 PM	SiCl4 MFC set to  50.000000
6/30/2010	6:22:02 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	6:22:02 PM	Tube furnace set to 1000
6/30/2010	6:37:02 PM	H2 valve closed
6/30/2010	6:37:02 PM	BCl3 valve closed
6/30/2010	6:37:02 PM	PH3 valve closed
6/30/2010	6:37:02 PM	SiCl4 pre valve closed
6/30/2010	6:37:02 PM	SiCl4 post valve closed
6/30/2010	6:37:02 PM	Main Vac valve closed
6/30/2010	6:37:02 PM	Bypass valve closed
6/30/2010	6:37:02 PM	Helium valve opened
6/30/2010	6:37:02 PM	Bubbler valve opened
6/30/2010	6:37:02 PM	Helium MFC set to  500.000000
6/30/2010	6:37:02 PM	H2 MFC set to  0.000000
6/30/2010	6:37:02 PM	BCl3 MFC set to  0.000000
6/30/2010	6:37:02 PM	PHl3 MFC set to  0.000000
6/30/2010	6:37:02 PM	SiCl4 MFC set to  0.000000
6/30/2010	6:37:02 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	6:37:03 PM	Tube furnace set to 0
6/30/2010	6:57:03 PM	Helium valve closed
6/30/2010	6:57:03 PM	H2 valve closed
6/30/2010	6:57:03 PM	BCl3 valve closed
6/30/2010	6:57:03 PM	PH3 valve closed
6/30/2010	6:57:03 PM	SiCl4 pre valve closed
6/30/2010	6:57:03 PM	SiCl4 post valve closed
6/30/2010	6:57:03 PM	Main Vac valve closed
6/30/2010	6:57:03 PM	Bypass valve closed
6/30/2010	6:57:03 PM	Bubbler valve closed
6/30/2010	6:57:03 PM	Helium MFC set to  0.000000
6/30/2010	6:57:03 PM	H2 MFC set to  0.000000
6/30/2010	6:57:03 PM	BCl3 MFC set to  0.000000
6/30/2010	6:57:03 PM	PHl3 MFC set to  0.000000
6/30/2010	6:57:03 PM	SiCl4 MFC set to  0.000000
6/30/2010	6:57:03 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	6:57:03 PM	Tube furnace set to 0
6/30/2010	6:57:03 PM	Run finished at 6:57 PM
6/30/2010	7:38:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	7:38:07 PM	Recipe started at 7:38 PM
6/30/2010	7:38:07 PM	Helium valve closed
6/30/2010	7:38:07 PM	H2 valve closed
6/30/2010	7:38:07 PM	BCl3 valve closed
6/30/2010	7:38:07 PM	PH3 valve closed
6/30/2010	7:38:07 PM	SiCl4 pre valve closed
6/30/2010	7:38:07 PM	SiCl4 post valve closed
6/30/2010	7:38:07 PM	Main Vac valve closed
6/30/2010	7:38:07 PM	Bubbler valve closed
6/30/2010	7:38:08 PM	Bypass valve opened
6/30/2010	7:38:08 PM	Helium MFC set to  0.000000
6/30/2010	7:38:08 PM	H2 MFC set to  0.000000
6/30/2010	7:38:08 PM	BCl3 MFC set to  0.000000
6/30/2010	7:38:08 PM	PHl3 MFC set to  0.000000
6/30/2010	7:38:08 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:38:08 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:38:08 PM	Tube furnace set to 0
6/30/2010	7:38:57 PM	Helium valve closed
6/30/2010	7:38:57 PM	H2 valve closed
6/30/2010	7:38:57 PM	BCl3 valve closed
6/30/2010	7:38:57 PM	PH3 valve closed
6/30/2010	7:38:57 PM	SiCl4 pre valve closed
6/30/2010	7:38:57 PM	SiCl4 post valve closed
6/30/2010	7:38:57 PM	Bubbler valve closed
6/30/2010	7:38:57 PM	Main Vac valve opened
6/30/2010	7:38:57 PM	Bypass valve opened
6/30/2010	7:38:57 PM	Helium MFC set to  0.000000
6/30/2010	7:38:57 PM	H2 MFC set to  0.000000
6/30/2010	7:38:57 PM	BCl3 MFC set to  0.000000
6/30/2010	7:38:57 PM	PHl3 MFC set to  0.000000
6/30/2010	7:38:57 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:38:57 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:38:57 PM	Tube furnace set to 0
6/30/2010	7:38:57 PM	Run finished at 7:38 PM
6/30/2010	7:38:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/30/2010	7:42:25 PM	Recipe started at 7:42 PM
6/30/2010	7:42:25 PM	Helium valve closed
6/30/2010	7:42:25 PM	H2 valve closed
6/30/2010	7:42:25 PM	BCl3 valve closed
6/30/2010	7:42:25 PM	PH3 valve closed
6/30/2010	7:42:25 PM	SiCl4 pre valve closed
6/30/2010	7:42:25 PM	SiCl4 post valve closed
6/30/2010	7:42:25 PM	Main Vac valve closed
6/30/2010	7:42:25 PM	Bubbler valve closed
6/30/2010	7:42:25 PM	Bypass valve opened
6/30/2010	7:42:25 PM	Helium MFC set to  0.000000
6/30/2010	7:42:25 PM	H2 MFC set to  0.000000
6/30/2010	7:42:25 PM	BCl3 MFC set to  0.000000
6/30/2010	7:42:25 PM	PHl3 MFC set to  0.000000
6/30/2010	7:42:25 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:42:25 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:42:25 PM	Tube furnace set to 0
6/30/2010	7:42:25 PM	Helium valve closed
6/30/2010	7:42:25 PM	H2 valve closed
6/30/2010	7:42:25 PM	BCl3 valve closed
6/30/2010	7:42:25 PM	PH3 valve closed
6/30/2010	7:42:25 PM	SiCl4 pre valve closed
6/30/2010	7:42:25 PM	SiCl4 post valve closed
6/30/2010	7:42:25 PM	Bubbler valve closed
6/30/2010	7:42:25 PM	Main Vac valve opened
6/30/2010	7:42:25 PM	Bypass valve opened
6/30/2010	7:42:25 PM	Helium MFC set to  0.000000
6/30/2010	7:42:25 PM	H2 MFC set to  0.000000
6/30/2010	7:42:25 PM	BCl3 MFC set to  0.000000
6/30/2010	7:42:25 PM	PHl3 MFC set to  0.000000
6/30/2010	7:42:25 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:42:25 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:42:25 PM	Tube furnace set to 0
6/30/2010	7:43:25 PM	H2 valve closed
6/30/2010	7:43:25 PM	BCl3 valve closed
6/30/2010	7:43:25 PM	PH3 valve closed
6/30/2010	7:43:25 PM	SiCl4 pre valve closed
6/30/2010	7:43:25 PM	SiCl4 post valve closed
6/30/2010	7:43:25 PM	Bubbler valve closed
6/30/2010	7:43:25 PM	Helium valve opened
6/30/2010	7:43:25 PM	Main Vac valve opened
6/30/2010	7:43:25 PM	Bypass valve opened
6/30/2010	7:43:25 PM	Helium MFC set to  100.000000
6/30/2010	7:43:25 PM	H2 MFC set to  0.000000
6/30/2010	7:43:25 PM	BCl3 MFC set to  0.000000
6/30/2010	7:43:25 PM	PHl3 MFC set to  0.000000
6/30/2010	7:43:25 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:43:25 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:43:25 PM	Tube furnace set to 0
6/30/2010	7:52:25 PM	Helium valve closed
6/30/2010	7:52:25 PM	H2 valve closed
6/30/2010	7:52:25 PM	BCl3 valve closed
6/30/2010	7:52:25 PM	PH3 valve closed
6/30/2010	7:52:25 PM	SiCl4 pre valve closed
6/30/2010	7:52:25 PM	SiCl4 post valve closed
6/30/2010	7:52:25 PM	Bubbler valve closed
6/30/2010	7:52:25 PM	Main Vac valve opened
6/30/2010	7:52:25 PM	Bypass valve opened
6/30/2010	7:52:25 PM	Helium MFC set to  0.000000
6/30/2010	7:52:25 PM	H2 MFC set to  0.000000
6/30/2010	7:52:25 PM	BCl3 MFC set to  0.000000
6/30/2010	7:52:25 PM	PHl3 MFC set to  0.000000
6/30/2010	7:52:25 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:52:25 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:52:25 PM	Tube furnace set to 0
6/30/2010	7:53:26 PM	H2 valve closed
6/30/2010	7:53:26 PM	BCl3 valve closed
6/30/2010	7:53:26 PM	PH3 valve closed
6/30/2010	7:53:26 PM	SiCl4 pre valve closed
6/30/2010	7:53:26 PM	SiCl4 post valve closed
6/30/2010	7:53:26 PM	Bubbler valve closed
6/30/2010	7:53:26 PM	Helium valve opened
6/30/2010	7:53:26 PM	Main Vac valve opened
6/30/2010	7:53:26 PM	Bypass valve opened
6/30/2010	7:53:26 PM	Helium MFC set to  100.000000
6/30/2010	7:53:26 PM	H2 MFC set to  0.000000
6/30/2010	7:53:26 PM	BCl3 MFC set to  0.000000
6/30/2010	7:53:26 PM	PHl3 MFC set to  0.000000
6/30/2010	7:53:26 PM	SiCl4 MFC set to  0.000000
6/30/2010	7:53:26 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	7:53:26 PM	Tube furnace set to 0
6/30/2010	8:02:26 PM	Helium valve closed
6/30/2010	8:02:26 PM	H2 valve closed
6/30/2010	8:02:26 PM	BCl3 valve closed
6/30/2010	8:02:26 PM	PH3 valve closed
6/30/2010	8:02:26 PM	SiCl4 pre valve closed
6/30/2010	8:02:26 PM	SiCl4 post valve closed
6/30/2010	8:02:26 PM	Bubbler valve closed
6/30/2010	8:02:26 PM	Main Vac valve opened
6/30/2010	8:02:26 PM	Bypass valve opened
6/30/2010	8:02:26 PM	Helium MFC set to  0.000000
6/30/2010	8:02:26 PM	H2 MFC set to  0.000000
6/30/2010	8:02:26 PM	BCl3 MFC set to  0.000000
6/30/2010	8:02:26 PM	PHl3 MFC set to  0.000000
6/30/2010	8:02:26 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:02:26 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:02:26 PM	Tube furnace set to 0
6/30/2010	8:03:26 PM	H2 valve closed
6/30/2010	8:03:26 PM	BCl3 valve closed
6/30/2010	8:03:26 PM	PH3 valve closed
6/30/2010	8:03:26 PM	SiCl4 pre valve closed
6/30/2010	8:03:26 PM	SiCl4 post valve closed
6/30/2010	8:03:26 PM	Bubbler valve closed
6/30/2010	8:03:26 PM	Helium valve opened
6/30/2010	8:03:26 PM	Main Vac valve opened
6/30/2010	8:03:26 PM	Bypass valve opened
6/30/2010	8:03:26 PM	Helium MFC set to  100.000000
6/30/2010	8:03:26 PM	H2 MFC set to  0.000000
6/30/2010	8:03:26 PM	BCl3 MFC set to  0.000000
6/30/2010	8:03:26 PM	PHl3 MFC set to  0.000000
6/30/2010	8:03:26 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:03:26 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:03:26 PM	Tube furnace set to 0
6/30/2010	8:12:26 PM	Helium valve closed
6/30/2010	8:12:26 PM	H2 valve closed
6/30/2010	8:12:26 PM	BCl3 valve closed
6/30/2010	8:12:26 PM	PH3 valve closed
6/30/2010	8:12:26 PM	SiCl4 pre valve closed
6/30/2010	8:12:26 PM	SiCl4 post valve closed
6/30/2010	8:12:26 PM	Bubbler valve closed
6/30/2010	8:12:26 PM	Main Vac valve opened
6/30/2010	8:12:26 PM	Bypass valve opened
6/30/2010	8:12:26 PM	Helium MFC set to  0.000000
6/30/2010	8:12:26 PM	H2 MFC set to  0.000000
6/30/2010	8:12:26 PM	BCl3 MFC set to  0.000000
6/30/2010	8:12:26 PM	PHl3 MFC set to  0.000000
6/30/2010	8:12:26 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:12:26 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:12:26 PM	Tube furnace set to 0
6/30/2010	8:13:26 PM	H2 valve closed
6/30/2010	8:13:26 PM	BCl3 valve closed
6/30/2010	8:13:26 PM	PH3 valve closed
6/30/2010	8:13:26 PM	SiCl4 pre valve closed
6/30/2010	8:13:26 PM	SiCl4 post valve closed
6/30/2010	8:13:26 PM	Bubbler valve closed
6/30/2010	8:13:26 PM	Helium valve opened
6/30/2010	8:13:26 PM	Main Vac valve opened
6/30/2010	8:13:26 PM	Bypass valve opened
6/30/2010	8:13:26 PM	Helium MFC set to  100.000000
6/30/2010	8:13:26 PM	H2 MFC set to  0.000000
6/30/2010	8:13:26 PM	BCl3 MFC set to  0.000000
6/30/2010	8:13:26 PM	PHl3 MFC set to  0.000000
6/30/2010	8:13:26 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:13:26 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:13:26 PM	Tube furnace set to 0
6/30/2010	8:14:26 PM	Helium valve closed
6/30/2010	8:14:26 PM	H2 valve closed
6/30/2010	8:14:26 PM	BCl3 valve closed
6/30/2010	8:14:26 PM	PH3 valve closed
6/30/2010	8:14:26 PM	SiCl4 pre valve closed
6/30/2010	8:14:26 PM	SiCl4 post valve closed
6/30/2010	8:14:26 PM	Bubbler valve closed
6/30/2010	8:14:26 PM	Main Vac valve opened
6/30/2010	8:14:26 PM	Bypass valve opened
6/30/2010	8:14:26 PM	Helium MFC set to  0.000000
6/30/2010	8:14:26 PM	H2 MFC set to  0.000000
6/30/2010	8:14:26 PM	BCl3 MFC set to  0.000000
6/30/2010	8:14:26 PM	PHl3 MFC set to  0.000000
6/30/2010	8:14:26 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:14:26 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:14:27 PM	Tube furnace set to 0
6/30/2010	8:15:27 PM	H2 valve closed
6/30/2010	8:15:27 PM	BCl3 valve closed
6/30/2010	8:15:27 PM	PH3 valve closed
6/30/2010	8:15:27 PM	SiCl4 pre valve closed
6/30/2010	8:15:27 PM	SiCl4 post valve closed
6/30/2010	8:15:27 PM	Bubbler valve closed
6/30/2010	8:15:27 PM	Helium valve opened
6/30/2010	8:15:27 PM	Main Vac valve opened
6/30/2010	8:15:27 PM	Bypass valve opened
6/30/2010	8:15:27 PM	Helium MFC set to  100.000000
6/30/2010	8:15:27 PM	H2 MFC set to  0.000000
6/30/2010	8:15:27 PM	BCl3 MFC set to  0.000000
6/30/2010	8:15:27 PM	PHl3 MFC set to  0.000000
6/30/2010	8:15:27 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:15:27 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:15:27 PM	Tube furnace set to 0
6/30/2010	8:16:27 PM	Helium valve closed
6/30/2010	8:16:27 PM	H2 valve closed
6/30/2010	8:16:27 PM	BCl3 valve closed
6/30/2010	8:16:27 PM	PH3 valve closed
6/30/2010	8:16:27 PM	SiCl4 pre valve closed
6/30/2010	8:16:27 PM	SiCl4 post valve closed
6/30/2010	8:16:27 PM	Bubbler valve closed
6/30/2010	8:16:27 PM	Main Vac valve opened
6/30/2010	8:16:27 PM	Bypass valve opened
6/30/2010	8:16:27 PM	Helium MFC set to  0.000000
6/30/2010	8:16:27 PM	H2 MFC set to  0.000000
6/30/2010	8:16:27 PM	BCl3 MFC set to  0.000000
6/30/2010	8:16:27 PM	PHl3 MFC set to  0.000000
6/30/2010	8:16:27 PM	SiCl4 MFC set to  0.000000
6/30/2010	8:16:27 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	8:16:27 PM	Tube furnace set to 0
6/30/2010	8:16:28 PM	Run finished at 8:16 PM
6/30/2010	8:37:08 PM	Helium MFC set to  100.000000
6/30/2010	8:37:10 PM	Helium valve opened
6/30/2010	8:38:20 PM	Helium valve closed
6/30/2010	8:39:07 PM	Helium MFC set to  0.000000
6/30/2010	9:08:10 PM	Recipe started at 9:08 PM
6/30/2010	9:08:10 PM	Helium valve closed
6/30/2010	9:08:10 PM	BCl3 valve closed
6/30/2010	9:08:10 PM	PH3 valve closed
6/30/2010	9:08:10 PM	SiCl4 pre valve closed
6/30/2010	9:08:10 PM	SiCl4 post valve closed
6/30/2010	9:08:10 PM	Main Vac valve closed
6/30/2010	9:08:10 PM	Bypass valve closed
6/30/2010	9:08:10 PM	Bubbler valve closed
6/30/2010	9:08:10 PM	H2 valve opened
6/30/2010	9:08:10 PM	Helium MFC set to  0.000000
6/30/2010	9:08:10 PM	H2 MFC set to  500.000000
6/30/2010	9:08:10 PM	BCl3 MFC set to  0.000000
6/30/2010	9:08:10 PM	PHl3 MFC set to  0.000000
6/30/2010	9:08:10 PM	SiCl4 MFC set to  0.000000
6/30/2010	9:08:10 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:08:10 PM	Tube furnace set to 0
6/30/2010	9:09:31 PM	Helium valve closed
6/30/2010	9:09:31 PM	BCl3 valve closed
6/30/2010	9:09:31 PM	PH3 valve closed
6/30/2010	9:09:31 PM	SiCl4 pre valve closed
6/30/2010	9:09:31 PM	SiCl4 post valve closed
6/30/2010	9:09:31 PM	Main Vac valve closed
6/30/2010	9:09:31 PM	Bypass valve closed
6/30/2010	9:09:31 PM	H2 valve opened
6/30/2010	9:09:31 PM	Bubbler valve opened
6/30/2010	9:09:31 PM	Helium MFC set to  0.000000
6/30/2010	9:09:31 PM	H2 MFC set to  500.000000
6/30/2010	9:09:31 PM	BCl3 MFC set to  0.000000
6/30/2010	9:09:31 PM	PHl3 MFC set to  0.000000
6/30/2010	9:09:31 PM	SiCl4 MFC set to  0.000000
6/30/2010	9:09:31 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:09:31 PM	Tube furnace set to 1000
6/30/2010	9:29:31 PM	Helium valve closed
6/30/2010	9:29:31 PM	PH3 valve closed
6/30/2010	9:29:31 PM	Main Vac valve closed
6/30/2010	9:29:31 PM	Bypass valve closed
6/30/2010	9:29:31 PM	H2 valve opened
6/30/2010	9:29:31 PM	BCl3 valve opened
6/30/2010	9:29:31 PM	SiCl4 pre valve opened
6/30/2010	9:29:31 PM	SiCl4 post valve opened
6/30/2010	9:29:31 PM	Bubbler valve opened
6/30/2010	9:29:31 PM	Helium MFC set to  0.000000
6/30/2010	9:29:31 PM	H2 MFC set to  500.000000
6/30/2010	9:29:31 PM	BCl3 MFC set to  24.000000
6/30/2010	9:29:31 PM	PHl3 MFC set to  0.000000
6/30/2010	9:29:31 PM	SiCl4 MFC set to  50.000000
6/30/2010	9:29:31 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:29:31 PM	Tube furnace set to 1000
6/30/2010	9:44:31 PM	H2 valve closed
6/30/2010	9:44:31 PM	BCl3 valve closed
6/30/2010	9:44:31 PM	PH3 valve closed
6/30/2010	9:44:31 PM	SiCl4 pre valve closed
6/30/2010	9:44:31 PM	SiCl4 post valve closed
6/30/2010	9:44:31 PM	Main Vac valve closed
6/30/2010	9:44:31 PM	Bypass valve closed
6/30/2010	9:44:31 PM	Helium valve opened
6/30/2010	9:44:31 PM	Bubbler valve opened
6/30/2010	9:44:31 PM	Helium MFC set to  500.000000
6/30/2010	9:44:31 PM	H2 MFC set to  0.000000
6/30/2010	9:44:31 PM	BCl3 MFC set to  0.000000
6/30/2010	9:44:31 PM	PHl3 MFC set to  0.000000
6/30/2010	9:44:31 PM	SiCl4 MFC set to  0.000000
6/30/2010	9:44:31 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	9:44:31 PM	Tube furnace set to 0
6/30/2010	10:04:31 PM	Helium valve closed
6/30/2010	10:04:31 PM	H2 valve closed
6/30/2010	10:04:31 PM	BCl3 valve closed
6/30/2010	10:04:31 PM	PH3 valve closed
6/30/2010	10:04:31 PM	SiCl4 pre valve closed
6/30/2010	10:04:31 PM	SiCl4 post valve closed
6/30/2010	10:04:31 PM	Main Vac valve closed
6/30/2010	10:04:31 PM	Bypass valve closed
6/30/2010	10:04:31 PM	Bubbler valve closed
6/30/2010	10:04:31 PM	Helium MFC set to  0.000000
6/30/2010	10:04:31 PM	H2 MFC set to  0.000000
6/30/2010	10:04:31 PM	BCl3 MFC set to  0.000000
6/30/2010	10:04:31 PM	PHl3 MFC set to  0.000000
6/30/2010	10:04:31 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:04:31 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:04:31 PM	Tube furnace set to 0
6/30/2010	10:04:32 PM	Run finished at 10:04 PM
6/30/2010	10:16:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	10:16:58 PM	Recipe started at 10:16 PM
6/30/2010	10:16:58 PM	H2 valve closed
6/30/2010	10:16:58 PM	BCl3 valve closed
6/30/2010	10:16:58 PM	PH3 valve closed
6/30/2010	10:16:58 PM	SiCl4 pre valve closed
6/30/2010	10:16:58 PM	SiCl4 post valve closed
6/30/2010	10:16:59 PM	Main Vac valve closed
6/30/2010	10:16:59 PM	Bypass valve closed
6/30/2010	10:16:59 PM	Bubbler valve closed
6/30/2010	10:16:59 PM	Helium valve opened
6/30/2010	10:16:59 PM	Helium MFC set to  500.000000
6/30/2010	10:16:59 PM	H2 MFC set to  0.000000
6/30/2010	10:16:59 PM	BCl3 MFC set to  0.000000
6/30/2010	10:16:59 PM	PHl3 MFC set to  0.000000
6/30/2010	10:16:59 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:16:59 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:16:59 PM	Tube furnace set to 0
6/30/2010	10:17:05 PM	Helium valve closed
6/30/2010	10:17:05 PM	H2 valve closed
6/30/2010	10:17:05 PM	BCl3 valve closed
6/30/2010	10:17:05 PM	PH3 valve closed
6/30/2010	10:17:05 PM	SiCl4 pre valve closed
6/30/2010	10:17:05 PM	SiCl4 post valve closed
6/30/2010	10:17:05 PM	Main Vac valve closed
6/30/2010	10:17:05 PM	Bypass valve closed
6/30/2010	10:17:05 PM	Bubbler valve closed
6/30/2010	10:17:05 PM	Helium MFC set to  0.000000
6/30/2010	10:17:05 PM	H2 MFC set to  0.000000
6/30/2010	10:17:05 PM	BCl3 MFC set to  0.000000
6/30/2010	10:17:05 PM	PHl3 MFC set to  0.000000
6/30/2010	10:17:05 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:17:05 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:17:06 PM	Tube furnace set to 0
6/30/2010	10:17:06 PM	Run finished at 10:17 PM
6/30/2010	10:17:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/30/2010	10:26:59 PM	Recipe started at 10:26 PM
6/30/2010	10:26:59 PM	Helium valve closed
6/30/2010	10:26:59 PM	H2 valve closed
6/30/2010	10:26:59 PM	BCl3 valve closed
6/30/2010	10:26:59 PM	PH3 valve closed
6/30/2010	10:26:59 PM	SiCl4 pre valve closed
6/30/2010	10:26:59 PM	SiCl4 post valve closed
6/30/2010	10:26:59 PM	Main Vac valve closed
6/30/2010	10:26:59 PM	Bubbler valve closed
6/30/2010	10:26:59 PM	Bypass valve opened
6/30/2010	10:26:59 PM	Helium MFC set to  0.000000
6/30/2010	10:26:59 PM	H2 MFC set to  0.000000
6/30/2010	10:26:59 PM	BCl3 MFC set to  0.000000
6/30/2010	10:26:59 PM	PHl3 MFC set to  0.000000
6/30/2010	10:26:59 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:26:59 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:26:59 PM	Tube furnace set to 0
6/30/2010	10:27:48 PM	Helium valve closed
6/30/2010	10:27:48 PM	H2 valve closed
6/30/2010	10:27:48 PM	BCl3 valve closed
6/30/2010	10:27:48 PM	PH3 valve closed
6/30/2010	10:27:48 PM	SiCl4 pre valve closed
6/30/2010	10:27:48 PM	SiCl4 post valve closed
6/30/2010	10:27:48 PM	Bubbler valve closed
6/30/2010	10:27:48 PM	Main Vac valve opened
6/30/2010	10:27:48 PM	Bypass valve opened
6/30/2010	10:27:48 PM	Helium MFC set to  0.000000
6/30/2010	10:27:48 PM	H2 MFC set to  0.000000
6/30/2010	10:27:48 PM	BCl3 MFC set to  0.000000
6/30/2010	10:27:48 PM	PHl3 MFC set to  0.000000
6/30/2010	10:27:48 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:27:48 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:27:48 PM	Tube furnace set to 0
6/30/2010	10:28:48 PM	H2 valve closed
6/30/2010	10:28:48 PM	BCl3 valve closed
6/30/2010	10:28:48 PM	PH3 valve closed
6/30/2010	10:28:48 PM	SiCl4 pre valve closed
6/30/2010	10:28:48 PM	SiCl4 post valve closed
6/30/2010	10:28:48 PM	Bubbler valve closed
6/30/2010	10:28:48 PM	Helium valve opened
6/30/2010	10:28:48 PM	Main Vac valve opened
6/30/2010	10:28:48 PM	Bypass valve opened
6/30/2010	10:28:48 PM	Helium MFC set to  100.000000
6/30/2010	10:28:48 PM	H2 MFC set to  0.000000
6/30/2010	10:28:48 PM	BCl3 MFC set to  0.000000
6/30/2010	10:28:48 PM	PHl3 MFC set to  0.000000
6/30/2010	10:28:48 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:28:48 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:28:48 PM	Tube furnace set to 0
6/30/2010	10:37:48 PM	Helium valve closed
6/30/2010	10:37:48 PM	H2 valve closed
6/30/2010	10:37:48 PM	BCl3 valve closed
6/30/2010	10:37:48 PM	PH3 valve closed
6/30/2010	10:37:48 PM	SiCl4 pre valve closed
6/30/2010	10:37:48 PM	SiCl4 post valve closed
6/30/2010	10:37:48 PM	Bubbler valve closed
6/30/2010	10:37:48 PM	Main Vac valve opened
6/30/2010	10:37:48 PM	Bypass valve opened
6/30/2010	10:37:48 PM	Helium MFC set to  0.000000
6/30/2010	10:37:48 PM	H2 MFC set to  0.000000
6/30/2010	10:37:48 PM	BCl3 MFC set to  0.000000
6/30/2010	10:37:48 PM	PHl3 MFC set to  0.000000
6/30/2010	10:37:48 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:37:48 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:37:48 PM	Tube furnace set to 0
6/30/2010	10:38:48 PM	H2 valve closed
6/30/2010	10:38:48 PM	BCl3 valve closed
6/30/2010	10:38:48 PM	PH3 valve closed
6/30/2010	10:38:48 PM	SiCl4 pre valve closed
6/30/2010	10:38:48 PM	SiCl4 post valve closed
6/30/2010	10:38:48 PM	Bubbler valve closed
6/30/2010	10:38:48 PM	Helium valve opened
6/30/2010	10:38:48 PM	Main Vac valve opened
6/30/2010	10:38:48 PM	Bypass valve opened
6/30/2010	10:38:48 PM	Helium MFC set to  100.000000
6/30/2010	10:38:48 PM	H2 MFC set to  0.000000
6/30/2010	10:38:48 PM	BCl3 MFC set to  0.000000
6/30/2010	10:38:48 PM	PHl3 MFC set to  0.000000
6/30/2010	10:38:48 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:38:48 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:38:48 PM	Tube furnace set to 0
6/30/2010	10:47:48 PM	Helium valve closed
6/30/2010	10:47:48 PM	H2 valve closed
6/30/2010	10:47:48 PM	BCl3 valve closed
6/30/2010	10:47:48 PM	PH3 valve closed
6/30/2010	10:47:48 PM	SiCl4 pre valve closed
6/30/2010	10:47:48 PM	SiCl4 post valve closed
6/30/2010	10:47:48 PM	Bubbler valve closed
6/30/2010	10:47:48 PM	Main Vac valve opened
6/30/2010	10:47:48 PM	Bypass valve opened
6/30/2010	10:47:48 PM	Helium MFC set to  0.000000
6/30/2010	10:47:48 PM	H2 MFC set to  0.000000
6/30/2010	10:47:48 PM	BCl3 MFC set to  0.000000
6/30/2010	10:47:48 PM	PHl3 MFC set to  0.000000
6/30/2010	10:47:48 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:47:48 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:47:48 PM	Tube furnace set to 0
6/30/2010	10:48:48 PM	H2 valve closed
6/30/2010	10:48:48 PM	BCl3 valve closed
6/30/2010	10:48:48 PM	PH3 valve closed
6/30/2010	10:48:48 PM	SiCl4 pre valve closed
6/30/2010	10:48:48 PM	SiCl4 post valve closed
6/30/2010	10:48:48 PM	Bubbler valve closed
6/30/2010	10:48:48 PM	Helium valve opened
6/30/2010	10:48:48 PM	Main Vac valve opened
6/30/2010	10:48:48 PM	Bypass valve opened
6/30/2010	10:48:48 PM	Helium MFC set to  100.000000
6/30/2010	10:48:48 PM	H2 MFC set to  0.000000
6/30/2010	10:48:48 PM	BCl3 MFC set to  0.000000
6/30/2010	10:48:48 PM	PHl3 MFC set to  0.000000
6/30/2010	10:48:48 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:48:48 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:48:49 PM	Tube furnace set to 0
6/30/2010	10:57:49 PM	Helium valve closed
6/30/2010	10:57:49 PM	H2 valve closed
6/30/2010	10:57:49 PM	BCl3 valve closed
6/30/2010	10:57:49 PM	PH3 valve closed
6/30/2010	10:57:49 PM	SiCl4 pre valve closed
6/30/2010	10:57:49 PM	SiCl4 post valve closed
6/30/2010	10:57:49 PM	Bubbler valve closed
6/30/2010	10:57:49 PM	Main Vac valve opened
6/30/2010	10:57:49 PM	Bypass valve opened
6/30/2010	10:57:49 PM	Helium MFC set to  0.000000
6/30/2010	10:57:49 PM	H2 MFC set to  0.000000
6/30/2010	10:57:49 PM	BCl3 MFC set to  0.000000
6/30/2010	10:57:49 PM	PHl3 MFC set to  0.000000
6/30/2010	10:57:49 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:57:49 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:57:49 PM	Tube furnace set to 0
6/30/2010	10:58:49 PM	H2 valve closed
6/30/2010	10:58:49 PM	BCl3 valve closed
6/30/2010	10:58:49 PM	PH3 valve closed
6/30/2010	10:58:49 PM	SiCl4 pre valve closed
6/30/2010	10:58:49 PM	SiCl4 post valve closed
6/30/2010	10:58:49 PM	Bubbler valve closed
6/30/2010	10:58:49 PM	Helium valve opened
6/30/2010	10:58:49 PM	Main Vac valve opened
6/30/2010	10:58:49 PM	Bypass valve opened
6/30/2010	10:58:49 PM	Helium MFC set to  100.000000
6/30/2010	10:58:49 PM	H2 MFC set to  0.000000
6/30/2010	10:58:49 PM	BCl3 MFC set to  0.000000
6/30/2010	10:58:49 PM	PHl3 MFC set to  0.000000
6/30/2010	10:58:49 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:58:49 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:58:49 PM	Tube furnace set to 0
6/30/2010	10:59:08 PM	Helium valve closed
6/30/2010	10:59:08 PM	H2 valve closed
6/30/2010	10:59:08 PM	BCl3 valve closed
6/30/2010	10:59:08 PM	PH3 valve closed
6/30/2010	10:59:08 PM	SiCl4 pre valve closed
6/30/2010	10:59:08 PM	SiCl4 post valve closed
6/30/2010	10:59:08 PM	Bubbler valve closed
6/30/2010	10:59:08 PM	Main Vac valve opened
6/30/2010	10:59:08 PM	Bypass valve opened
6/30/2010	10:59:08 PM	Helium MFC set to  0.000000
6/30/2010	10:59:08 PM	H2 MFC set to  0.000000
6/30/2010	10:59:08 PM	BCl3 MFC set to  0.000000
6/30/2010	10:59:08 PM	PHl3 MFC set to  0.000000
6/30/2010	10:59:08 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:59:08 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:59:08 PM	Tube furnace set to 0
6/30/2010	10:59:40 PM	H2 valve closed
6/30/2010	10:59:40 PM	BCl3 valve closed
6/30/2010	10:59:40 PM	PH3 valve closed
6/30/2010	10:59:40 PM	SiCl4 pre valve closed
6/30/2010	10:59:40 PM	SiCl4 post valve closed
6/30/2010	10:59:40 PM	Bubbler valve closed
6/30/2010	10:59:40 PM	Helium valve opened
6/30/2010	10:59:40 PM	Main Vac valve opened
6/30/2010	10:59:40 PM	Bypass valve opened
6/30/2010	10:59:40 PM	Helium MFC set to  100.000000
6/30/2010	10:59:40 PM	H2 MFC set to  0.000000
6/30/2010	10:59:40 PM	BCl3 MFC set to  0.000000
6/30/2010	10:59:40 PM	PHl3 MFC set to  0.000000
6/30/2010	10:59:40 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:59:40 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:59:40 PM	Tube furnace set to 0
6/30/2010	10:59:41 PM	Helium valve closed
6/30/2010	10:59:41 PM	H2 valve closed
6/30/2010	10:59:41 PM	BCl3 valve closed
6/30/2010	10:59:41 PM	PH3 valve closed
6/30/2010	10:59:41 PM	SiCl4 pre valve closed
6/30/2010	10:59:41 PM	SiCl4 post valve closed
6/30/2010	10:59:41 PM	Bubbler valve closed
6/30/2010	10:59:41 PM	Main Vac valve opened
6/30/2010	10:59:41 PM	Bypass valve opened
6/30/2010	10:59:41 PM	Helium MFC set to  0.000000
6/30/2010	10:59:41 PM	H2 MFC set to  0.000000
6/30/2010	10:59:41 PM	BCl3 MFC set to  0.000000
6/30/2010	10:59:41 PM	PHl3 MFC set to  0.000000
6/30/2010	10:59:41 PM	SiCl4 MFC set to  0.000000
6/30/2010	10:59:41 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	10:59:41 PM	Tube furnace set to 0
6/30/2010	10:59:42 PM	Run finished at 10:59 PM
6/30/2010	11:06:47 PM	Recipe started at 11:06 PM
6/30/2010	11:06:47 PM	Helium valve closed
6/30/2010	11:06:47 PM	BCl3 valve closed
6/30/2010	11:06:47 PM	PH3 valve closed
6/30/2010	11:06:47 PM	SiCl4 pre valve closed
6/30/2010	11:06:47 PM	SiCl4 post valve closed
6/30/2010	11:06:47 PM	Main Vac valve closed
6/30/2010	11:06:47 PM	Bypass valve closed
6/30/2010	11:06:47 PM	Bubbler valve closed
6/30/2010	11:06:47 PM	H2 valve opened
6/30/2010	11:06:47 PM	Helium MFC set to  0.000000
6/30/2010	11:06:47 PM	H2 MFC set to  500.000000
6/30/2010	11:06:47 PM	BCl3 MFC set to  0.000000
6/30/2010	11:06:47 PM	PHl3 MFC set to  0.000000
6/30/2010	11:06:47 PM	SiCl4 MFC set to  0.000000
6/30/2010	11:06:47 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:06:47 PM	Tube furnace set to 0
6/30/2010	11:08:07 PM	Helium valve closed
6/30/2010	11:08:07 PM	BCl3 valve closed
6/30/2010	11:08:07 PM	PH3 valve closed
6/30/2010	11:08:07 PM	SiCl4 pre valve closed
6/30/2010	11:08:07 PM	SiCl4 post valve closed
6/30/2010	11:08:07 PM	Main Vac valve closed
6/30/2010	11:08:07 PM	Bypass valve closed
6/30/2010	11:08:07 PM	H2 valve opened
6/30/2010	11:08:07 PM	Bubbler valve opened
6/30/2010	11:08:07 PM	Helium MFC set to  0.000000
6/30/2010	11:08:07 PM	H2 MFC set to  500.000000
6/30/2010	11:08:07 PM	BCl3 MFC set to  0.000000
6/30/2010	11:08:07 PM	PHl3 MFC set to  0.000000
6/30/2010	11:08:07 PM	SiCl4 MFC set to  0.000000
6/30/2010	11:08:07 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:08:07 PM	Tube furnace set to 1000
6/30/2010	11:28:07 PM	Helium valve closed
6/30/2010	11:28:07 PM	PH3 valve closed
6/30/2010	11:28:07 PM	Main Vac valve closed
6/30/2010	11:28:07 PM	Bypass valve closed
6/30/2010	11:28:07 PM	H2 valve opened
6/30/2010	11:28:07 PM	BCl3 valve opened
6/30/2010	11:28:07 PM	SiCl4 pre valve opened
6/30/2010	11:28:07 PM	SiCl4 post valve opened
6/30/2010	11:28:07 PM	Bubbler valve opened
6/30/2010	11:28:07 PM	Helium MFC set to  0.000000
6/30/2010	11:28:07 PM	H2 MFC set to  500.000000
6/30/2010	11:28:07 PM	BCl3 MFC set to  6.000000
6/30/2010	11:28:07 PM	PHl3 MFC set to  0.000000
6/30/2010	11:28:07 PM	SiCl4 MFC set to  50.000000
6/30/2010	11:28:07 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:28:07 PM	Tube furnace set to 1000
6/30/2010	11:43:07 PM	H2 valve closed
6/30/2010	11:43:07 PM	BCl3 valve closed
6/30/2010	11:43:07 PM	PH3 valve closed
6/30/2010	11:43:07 PM	SiCl4 pre valve closed
6/30/2010	11:43:07 PM	SiCl4 post valve closed
6/30/2010	11:43:07 PM	Main Vac valve closed
6/30/2010	11:43:07 PM	Bypass valve closed
6/30/2010	11:43:07 PM	Helium valve opened
6/30/2010	11:43:07 PM	Bubbler valve opened
6/30/2010	11:43:07 PM	Helium MFC set to  500.000000
6/30/2010	11:43:07 PM	H2 MFC set to  0.000000
6/30/2010	11:43:07 PM	BCl3 MFC set to  0.000000
6/30/2010	11:43:07 PM	PHl3 MFC set to  0.000000
6/30/2010	11:43:07 PM	SiCl4 MFC set to  0.000000
6/30/2010	11:43:07 PM	Bypass solenoid MFC set to  0.000000
6/30/2010	11:43:07 PM	Tube furnace set to 0
